Electromigration in 0.25 μm wide Cu line on W

Thin Solid Films

Volumn 308-309, Issue 1-4, 1997, Pages 443-447

  Hu, C K ^a   Lee, K Y ^a   Gignac, L ^a   Carruthers, R ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

Cu lines; Electromigration; Microstructure

Indexed keywords

ACTIVATION ENERGY; ANODES; CATHODES; CRYSTAL MICROSTRUCTURE; ELECTROMIGRATION; POLYCRYSTALLINE MATERIALS; TRANSMISSION ELECTRON MICROSCOPY; TUNGSTEN;

EDGE DISPLACEMENT TECHNIQUE;

COPPER;

EID: 0031245670     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00487-2     Document Type: Article

References (22)

1. D.C. Edelstein, G.A. Sai-Halasz and Y.J. Mii, IBM J. Res. Develop., 39 (1995) 383.
2. S.P. Murarka, S.W. Hymes, Crit. Rev. Solid State Mater. Sci., 20 (1995) 87.
3. C.K. Hu, M.B. Small, F. Kaufman and D.J. Pearson, Mater. Res. Soc. Symp. Proc., 225 (1990) 369.
4. For example, see special volume of Mater. Res. Soc. Bull., 19 (1994).
5. Thin Solid Films, 262 (1-2) (1995).
6. H.K. Huang, I. Asano, C. Ryu and S.S. Wong, Proc. IEEE VMIC Conf., IEEE, NY, 1993, p. 223.
7. C.W. Park and R.W. Vook, Appl. Phys. Lett. 59 (1991) 175.
8. R. Frankovic and G.H. Bernstein, IEEE Transact. Electron Devices, 43 (1996) 2233.
9. T. Nitta, T. Ohhmi, M. Otsuki, T. Takewaki and T. Shibata, J. Electrochem. Soc., 139 (1992) 922.
10. C.K. Hu, B. Luther, F.B. Kaufman, J. Hummel, C. Uzoh and D.J. Pearson, Thin Solid Films, 262 (1995) 84.
11. K.L. Lee, C.K. Hu and K.N Tu, J. Appl. Phys., 78 (1995) 4428.
12. C.K. Hu, K.Y. Lee, K.L. Lee, C. Cabral Jr., E.G. Colgan and C. Stanis, J. Electrochem. Soc., 143 (1996) 1001.
13. C.K. Hu, K.Y. Lee, D. Gupta and P. Blauner, Mater. Res. Soc. Symp. Proc., 428 (1996) 43.
14. C.W. Park and R.W. Vook, Thin Solid Films, 226 (1993) 238.
15. J.R. Lloyd and J.J. Clement, Thin Solid Films, 262 (1995) 135.
16. C.K. Hu, K. Rodbell, T. Sullivan, K.Y. Lee and D. Bouldin, J. IBM Res. Dev., 39 (1995) 465.
17. D.B. Butrympwicz, J.R. Manning and M.E. Read, J. Phys. Chem. Ref. Data, 6 (1977) 1.
18. D.B. Butrympwicz, J.R. Manning and M.E. Read, J. Phys. Chem. Ref. Data, 2 (1977) 643.
19. T. Surholt, Yu. M. Mishin and Ch. Herzig, Phys. Rev. B, 50 (1994) 3577.
20. H.P. Bonzel, in J.M. Blakly (ed.), Surface Physics of Materials, Vol. II, Academic Press, NY, 1975, Ch. 6.
21. N.A. Gjostein, in J.J. Burke, N.L. Reed and V. Weiss (eds.), Surfaces and Interfaces I, Syracuse University Press, NY, 1966, Ch. 11.
22. F. Delamare and G.E. Rhead, Surf. Sci., 28 (1971) 267.