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Volumn 16, Issue 1, 2001, Pages 217-225

Optical evaluation of the flexural rigidity and residual stress in thin membranes: Picosecond transient grating measurements of the dispersion of the lowest-order Lamb acoustic waveguide mode

(2) Rogers, John A a Bogart, Gregory R a

a LUCENT TECHNOLOGIES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE SCATTERING; DIFFRACTION GRATINGS; LASER PULSES; LITHOGRAPHY; MEMBRANES; OPTICAL WAVEGUIDES; PHOTOACOUSTIC EFFECT; PROBES; RESIDUAL STRESSES; RIGIDITY;

THIN MEMBRANES;

MULTILAYERS;

EID: 0035239709 PISSN: 08842914 EISSN: None Source Type: Journal
DOI: 10.1557/JMR.2001.0034 Document Type: Article

Times cited : (4)

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