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Volumn 106, Issue 1, 2001, Pages 1-23

Length and dimensional measurements at NIST

Author keywords

Atomic force; Dimensional; Interferometry; Length; Measurements; Microscopes; Optical; Scanning electron; Scanning tunneling; Traceability

Indexed keywords


EID: 0035040858     PISSN: 1044677X     EISSN: None     Source Type: Journal    
DOI: 10.6028/jres.106.002     Document Type: Article
Times cited : (31)

References (78)
  • 2
    • 85051255963 scopus 로고
    • New definition of the meter: The wavelength of krypton-86
    • Paris France
    • CIPM, New definition of the meter: the wavelength of krypton-86, Proc. 11th General Council of Weights and Measures, Paris France (1960).
    • (1960) Proc. 11th General Council of Weights and Measures
  • 3
    • 33749111990 scopus 로고
    • Documents concerning the new definition of the meter
    • Documents concerning the new definition of the meter, Metrologia 19, 163-177 (1984).
    • (1984) Metrologia , vol.19 , pp. 163-177
  • 4
    • 0000673599 scopus 로고    scopus 로고
    • Practical realization of the definition of the metre
    • T. J. Quinn, Practical realization of the definition of the metre, Metrologia 36 (3), 211-244 (1997).
    • (1997) Metrologia , vol.36 , Issue.3 , pp. 211-244
    • Quinn, T.J.1
  • 7
    • 0015725414 scopus 로고
    • Description, performance and wavelengths of iodine stabilized lasers
    • W. Schweitzer, E. Kessler, R. Deslattes, H. Layer, and J. Whetstone, Description, performance and wavelengths of iodine stabilized lasers, Appl. Opt. 12 (1), 2927-2938 (1973).
    • (1973) Appl. Opt. , vol.12 , Issue.1 , pp. 2927-2938
    • Schweitzer, W.1    Kessler, E.2    Deslattes, R.3    Layer, H.4    Whetstone, J.5
  • 8
    • 0016931916 scopus 로고
    • Laser wavelength comparison by high resolution interferometry
    • H. Layer, R. Deslattes, and W. Schweitzer, Laser wavelength comparison by high resolution interferometry, Appl. Opt. 15 (3), 734-743 (1976).
    • (1976) Appl. Opt. , vol.15 , Issue.3 , pp. 734-743
    • Layer, H.1    Deslattes, R.2    Schweitzer, W.3
  • 9
    • 0019242738 scopus 로고
    • A portable iodine stabilized helium-neon laser
    • H. Layer, A portable iodine stabilized helium-neon laser, IEEE Trans. Instrum. Meas. 29, 4 (1980).
    • (1980) IEEE Trans. Instrum. Meas. , vol.29 , pp. 4
    • Layer, H.1
  • 10
    • 84975603487 scopus 로고
    • Direct frequency measurements of the 12-stabilized He-Ne 473-THz (633-nm) Laser
    • D. Jennings, C. Pollock, F. Peterson, K. Evenson, J. Wells, J. Hall, and H. Layer, Direct frequency measurements of the 12-stabilized He-Ne 473-THz (633-nm) Laser, Opt. Lett. 8 (3), 136-138 (1983).
    • (1983) Opt. Lett. , vol.8 , Issue.3 , pp. 136-138
    • Jennings, D.1    Pollock, C.2    Peterson, F.3    Evenson, K.4    Wells, J.5    Hall, J.6    Layer, H.7
  • 12
    • 0000396742 scopus 로고    scopus 로고
    • Uncertainty and dimensional calibrations
    • T. Doiron and J. Stoup, Uncertainty and dimensional calibrations, J. Res. Natl. Inst. Stand. Technol. 102 (6), 647-676 (1997).
    • (1997) J. Res. Natl. Inst. Stand. Technol. , vol.102 , Issue.6 , pp. 647-676
    • Doiron, T.1    Stoup, J.2
  • 13
    • 1642548707 scopus 로고
    • Interference methods for standardizing and testing precision gage blocks
    • C. Peters and H. Boyd, Interference methods for standardizing and testing precision gage blocks, Scientific Papers of the Bureau of Standards 17, No. 436, 677-713 (1922).
    • (1922) Scientific Papers of the Bureau of Standards , vol.17 , Issue.436 , pp. 677-713
    • Peters, C.1    Boyd, H.2
  • 14
    • 0000704117 scopus 로고
    • The Topografiner: An instrument for measuring surface microtopography
    • R. Young, The Topografiner: an instrument for measuring surface microtopography, Rev. Sci. Instr. 43 (7), 999-1011 (1972).
    • (1972) Rev. Sci. Instr. , vol.43 , Issue.7 , pp. 999-1011
    • Young, R.1
  • 15
    • 0023349118 scopus 로고
    • Submicrometer linewidth metrology in the optical microscope
    • D. Nyyssonen and R. Larrabee, Submicrometer linewidth metrology in the optical microscope, Natl. Inst. Stand. Technol. 92 (3), 187-204 (1987).
    • (1987) Natl. Inst. Stand. Technol. , vol.92 , Issue.3 , pp. 187-204
    • Nyyssonen, D.1    Larrabee, R.2
  • 17
    • 0019716673 scopus 로고
    • Quantitative sub-micrometer linewidth determination using electron microscopy
    • S. Jensen, G. Hembree, J. Marciando, and D. Swyt, Quantitative sub-micrometer linewidth determination using electron microscopy, SPIE 275, 100-108 (1981).
    • (1981) SPIE , vol.275 , pp. 100-108
    • Jensen, S.1    Hembree, G.2    Marciando, J.3    Swyt, D.4
  • 19
    • 1642425961 scopus 로고
    • Current status and future trends of ultra-precision machining and ultra-fine materials processing
    • N. Taniguchi, Current status and future trends of ultra-precision machining and ultra-fine materials processing, Annals CIRP 2, 2-5 (1983).
    • (1983) Annals CIRP , vol.2 , pp. 2-5
    • Taniguchi, N.1
  • 22
    • 1642425962 scopus 로고    scopus 로고
    • A new technique for measuring interferometric phase shifts of gage blocks
    • Pasadena CA
    • J. Stoup, B. Faust, and T. Doiron, A new technique for measuring interferometric phase shifts of gage blocks, Proc. Meas. Sci. Conf., Pasadena CA (1997).
    • (1997) Proc. Meas. Sci. Conf.
    • Stoup, J.1    Faust, B.2    Doiron, T.3
  • 24
    • 0032628371 scopus 로고    scopus 로고
    • Dimensional metrology with the NIST calibrated atomic force microscope
    • R. Dixson, R. Köning, V. Tsai, J. Fu, and T. Vorburger, Dimensional metrology with the NIST calibrated atomic force microscope, Proc. SPIE 3677, 20 (1999).
    • (1999) Proc. SPIE , vol.3677 , pp. 20
    • Dixson, R.1    Köning, R.2    Tsai, V.3    Fu, J.4    Vorburger, T.5
  • 28
    • 0023346758 scopus 로고
    • Submicrometer microelectronics dimensional metrology: Scanning electron microscopy
    • U.S.
    • M. Postek and D. Joy, Submicrometer microelectronics dimensional metrology: scanning electron microscopy, J. Res. Natl. Bur. Stand. (U.S.) 92, 187-204 (1987).
    • (1987) J. Res. Natl. Bur. Stand. , vol.92 , pp. 187-204
    • Postek, M.1    Joy, D.2
  • 31
    • 0020331251 scopus 로고
    • Sinusoidal profile precision roughness specimens
    • E. Teague, F. Scire, and T. Vorburger, Sinusoidal profile precision roughness specimens, Wear 83, 61-73 (1982).
    • (1982) Wear , vol.83 , pp. 61-73
    • Teague, E.1    Scire, F.2    Vorburger, T.3
  • 34
    • 84987788071 scopus 로고
    • New concepts in precision dimensional measurement for modern manufacturing
    • C. T. Leondes, ed., Academic Press, New York
    • D. Swyt, New concepts in precision dimensional measurement for modern manufacturing, in Control and Dynamic Systems. Vol. 45, C. T. Leondes, ed., Academic Press, New York (1992) pp. 111-163 (p. 122).
    • (1992) Control and Dynamic Systems , vol.45 , pp. 111-163
    • Swyt, D.1
  • 35
    • 0000123021 scopus 로고
    • The measurement and uncertainty of a calibration standard for the scanning electron microscope
    • J. Fu, M. Croarkin, and T. Vorburger. The measurement and uncertainty of a calibration standard for the scanning electron microscope, J. Res. Natl. Inst. Stand. Technol. 99 (2), 191-199 (1994).
    • (1994) J. Res. Natl. Inst. Stand. Technol. , vol.99 , Issue.2 , pp. 191-199
    • Fu, J.1    Croarkin, M.2    Vorburger, T.3
  • 38
    • 0028698741 scopus 로고
    • Morphological estimation of tip geometry for scanned probe microscopy
    • J. Viliarrubia, Morphological estimation of tip geometry for scanned probe microscopy, Surf. Sci. 321, 287 (1994).
    • (1994) Surf. Sci. , vol.321 , pp. 287
    • Viliarrubia, J.1
  • 39
    • 1642548706 scopus 로고    scopus 로고
    • A constrained Monte Carlo simulation method for the calculation of CMM measurement uncertainty
    • in press
    • S. Phillips, B. Borchardt, D. Sawyer, and W. Estler, A constrained Monte Carlo simulation method for the calculation of CMM measurement uncertainty, Prec. Eng., in press (1999).
    • (1999) Prec. Eng.
    • Phillips, S.1    Borchardt, B.2    Sawyer, D.3    Estler, W.4
  • 40
    • 0006157588 scopus 로고    scopus 로고
    • Calculation of measurement uncertainty using prior information
    • S. Phillips and W. Estler, Calculation of measurement uncertainty using prior information, J. Res. Natl. Inst. Stand. Technol. 103 (6), 625-631 (1998).
    • (1998) J. Res. Natl. Inst. Stand. Technol. , vol.103 , Issue.6 , pp. 625-631
    • Phillips, S.1    Estler, W.2
  • 41
    • 1642425947 scopus 로고    scopus 로고
    • Measurement uncertainty and uncorrected bias
    • Charlotte NC
    • S. Phillips, K. Eberhardt, and W. Estler, Measurement uncertainty and uncorrected bias, Proc. NCSL, Charlotte NC (1999).
    • (1999) Proc. NCSL
    • Phillips, S.1    Eberhardt, K.2    Estler, W.3
  • 42
    • 1642507784 scopus 로고    scopus 로고
    • Two-dimensional calibration and measurement methodology
    • R. Silver, T. Doiron, W. Penzes, S. Fox, and E. Kornegay, Two-dimensional calibration and measurement methodology, Proc. SPIE 3677, 37 (1999)
    • (1999) Proc. SPIE , vol.3677 , pp. 37
    • Silver, R.1    Doiron, T.2    Penzes, W.3    Fox, S.4    Kornegay, E.5
  • 43
    • 1642507787 scopus 로고
    • A high-accuracy micrometer for diameter measurements of cylindrical standards
    • Anaheim CA
    • J. Stoup and J. Doiron, A high-accuracy micrometer for diameter measurements of cylindrical standards, Proc. Meas. Sci. Conf., Anaheim CA (1994).
    • (1994) Proc. Meas. Sci. Conf.
    • Stoup, J.1    Doiron, J.2
  • 45
    • 0032401384 scopus 로고    scopus 로고
    • Developing a method to determine linewidth based on counting the atom spacings across a line
    • R. Silver, C. Jensen, V. Tsai, J. Fu, J., Villarrubia, and E. Teague, Developing a method to determine linewidth based on counting the atom spacings across a line, Proc. SPIE 3332, 441 (1998).
    • (1998) Proc. SPIE , vol.3332 , pp. 441
    • Silver, R.1    Jensen, C.2    Tsai, V.3    Fu, J.4    Villarrubia, J.5    Teague, E.6
  • 49
    • 1642425959 scopus 로고    scopus 로고
    • Intel Microprocessor Hall of Fame, History of the microprocessor, http://www.intel.com/intel/museum/25anniv/hof/moore.htm (2000).
    • (2000) History of the Microprocessor
  • 50
    • 1642548702 scopus 로고    scopus 로고
    • National Storage Industry Consortium, San Diego CA
    • NSIC, Head Metrology Requirements Roadmap, National Storage Industry Consortium, San Diego CA (1997) p. 2.
    • (1997) Head Metrology Requirements Roadmap , pp. 2
  • 51
    • 0003552056 scopus 로고    scopus 로고
    • Semiconductor Industry Association, third edition, San Jose CA
    • SIA, The National Technology Roadmap For Semiconductors, Semiconductor Industry Association, third edition, San Jose CA (1997) p. 85.
    • (1997) The National Technology Roadmap for Semiconductors , pp. 85
  • 53
    • 0001199708 scopus 로고    scopus 로고
    • Absolute interferometry with 670 nm external cavity diode laser
    • J. Stone, A. Stejskal, and L. Howard, Absolute interferometry with 670 nm external cavity diode laser, Appl. Opt. 38, 5981 (1999).
    • (1999) Appl. Opt. , vol.38 , pp. 5981
    • Stone, J.1    Stejskal, A.2    Howard, L.3
  • 58
    • 0023349118 scopus 로고
    • Sub-micrometer linewidth metrology in the optical microscope
    • U.S.
    • D. Nyyssonen and R. Larrabee, Sub-micrometer linewidth metrology in the optical microscope. J. Res. Natl. Bur. Stand. (U.S.) 92, 205-228 (1987).
    • (1987) J. Res. Natl. Bur. Stand. , vol.92 , pp. 205-228
    • Nyyssonen, D.1    Larrabee, R.2
  • 59
    • 0002189608 scopus 로고    scopus 로고
    • Critical dimension metrology in the scanning electron microscope
    • Alain Diebold, ed., Marcel Dekker, New York
    • M. Postek and A. Vladar, Critical dimension metrology in the scanning electron microscope, Handbook of Silicon Semiconductor Metrology, Alain Diebold, ed., Marcel Dekker, New York (2000).
    • (2000) Handbook of Silicon Semiconductor Metrology
    • Postek, M.1    Vladar, A.2
  • 60
    • 1642548697 scopus 로고    scopus 로고
    • Tip characterization for dimensional nanometrology
    • H. Fuchs, R. Colton, and S. Hosaka, eds., Springer-Verlag
    • J. Villarrubia, Tip characterization for dimensional nanometrology, Industrial SXM Techniques, H. Fuchs, R. Colton, and S. Hosaka, eds., Springer-Verlag (1999).
    • (1999) Industrial SXM Techniques
    • Villarrubia, J.1
  • 61
    • 0032401384 scopus 로고    scopus 로고
    • Developing a method to determine linewidlh based on counting the atom spacings across a line
    • R. Silver, C. Jensen, V. Tsai, J. Fu. J., Villarrubia, and B. Teague, Developing a method to determine linewidlh based on counting the atom spacings across a line, Proc. SPIE 3332. 441 (1998).
    • (1998) Proc. SPIE , vol.3332 , pp. 441
    • Silver, R.1    Jensen, C.2    Tsai, V.3    Fu, J.4    Villarrubia, J.5    Teague, B.6
  • 64
    • 1642507778 scopus 로고
    • Space-time
    • R. Lerner and G. Trigg, eds., VCH Publishers, New York
    • J. Goldberg, Space-time, in Encyclopedia of Physics, R. Lerner and G. Trigg, eds., VCH Publishers, New York (1991) p. 1158.
    • (1991) Encyclopedia of Physics , pp. 1158
    • Goldberg, J.1
  • 66
    • 0000294788 scopus 로고
    • Quantum non-demolition measurements
    • V. Braginsky, Y. Vorontsov, and K. Thorne, Quantum non-demolition measurements. Science 209, 547 (1980).
    • (1980) Science , vol.209 , pp. 547
    • Braginsky, V.1    Vorontsov, Y.2    Thorne, K.3
  • 69
    • 0029293566 scopus 로고
    • The accuracy evaluation of NIST-7 (cesium beam primary frequency standard)
    • W. Lee, J. Shirley, J. Lowe, and R. Drullinger. The accuracy evaluation of NIST-7 (cesium beam primary frequency standard). IEEE Trans. Instru. Meas. 44, 120-123 (1995).
    • (1995) IEEE Trans. Instru. Meas. , vol.44 , pp. 120-123
    • Lee, W.1    Shirley, J.2    Lowe, J.3    Drullinger, R.4
  • 71
    • 0001875034 scopus 로고
    • The uncertainty of dimensional measurements made at non-standard temperatures
    • D. Swyt, The uncertainty of dimensional measurements made at non-standard temperatures. J. Res. Natl. Inst. Stand. Technol. 99 (1), 31-44 (1994).
    • (1994) J. Res. Natl. Inst. Stand. Technol. , vol.99 , Issue.1 , pp. 31-44
    • Swyt, D.1
  • 72
    • 0021918163 scopus 로고
    • High accuracy displacement interferometry in air
    • W. Estler, High accuracy displacement interferometry in air, Appl. Opt. 24, 808 (1985).
    • (1985) Appl. Opt. , vol.24 , pp. 808
    • Estler, W.1
  • 73
    • 85055353087 scopus 로고    scopus 로고
    • NORAMET Document No. 7 (1997-04-23), Natl. Inst. Stand. Technol.
    • North American Metrology Cooperation, Traceability, NORAMET Document No. 7 (1997-04-23), Natl. Inst. Stand. Technol. (1997).
    • (1997) Traceability
  • 75
    • 0005303307 scopus 로고
    • Metrological Issues in Precision-Tolerance Manufacturing: A Report of a NIST Industry-Needs Workshop
    • D. Swyt, Metrological Issues in Precision-Tolerance Manufacturing: A Report of a NIST Industry-Needs Workshop, J. Res. Natl. Inst. Stand. Technol. 98, 245-252 (1993).
    • (1993) J. Res. Natl. Inst. Stand. Technol. , vol.98 , pp. 245-252
    • Swyt, D.1
  • 76
    • 0028403685 scopus 로고
    • Chains of Standards: A new concept in GPS standards
    • P. Bennich, Chains of Standards: A new concept in GPS standards, Mfg. Rev. 7, 29-35 (1994).
    • (1994) Mfg. Rev. , vol.7 , pp. 29-35
    • Bennich, P.1
  • 78
    • 1642548692 scopus 로고    scopus 로고
    • NIST Manufacturing Engineering Laboratory, Internal Documents, Natl. Inst. Stand. Technol.
    • D. Swyt, Strategic Program in the Shop Floor as NMI, NIST Manufacturing Engineering Laboratory, Internal Documents, Natl. Inst. Stand. Technol. (1999).
    • (1999) Strategic Program in the Shop Floor as NMI
    • Swyt, D.1


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