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Volumn 19, Issue 2-3, 1996, Pages 157-163

Stylus-laser surface calibration system

Author keywords

Calibration; Roughness; Sinusoidal profiles; Stylus instruments; Stylus laser; Surface texture; Traceability; Uncertainty

Indexed keywords

CALIBRATION; INTERFEROMETRY; LASER OPTICS; ROUGHNESS MEASUREMENT; STANDARDS;

EID: 0030264856     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0141-6359(96)00043-8     Document Type: Article
Times cited : (6)

References (18)
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    • Teague, E.C.1    Scire, F.E.2    Vorburger, T.V.3
  • 3
    • 0021550649 scopus 로고
    • Production techniques for the preparation of sinusoidal profile surface roughness specimens
    • Clark, R. A. "Production techniques for the preparation of sinusoidal profile surface roughness specimens," Proc SPIE, 508, 1984, 20
    • (1984) Proc SPIE , vol.508 , pp. 20
    • Clark, R.A.1
  • 4
    • 0003550314 scopus 로고
    • NIST Special Publication 260, Gaithersburg, MD: National Institute of Standards and Technology
    • Trahey, N. M., ed. NIST Standard Reference Materials Catalog 1995-1996, NIST Special Publication 260, Gaithersburg, MD: National Institute of Standards and Technology, 1995, p. 127
    • (1995) NIST Standard Reference Materials Catalog 1995-1996 , pp. 127
    • Trahey, N.M.1
  • 5
    • 0042409039 scopus 로고
    • Present and future standard specimens for surface finish metrology
    • Vorburger, T. V., Song, J. F., Marx, E., Scace, B. R. and Lettieri, T. R. "Present and future standard specimens for surface finish metrology," Proc SPIE, 1720, 1992, 78
    • (1992) Proc SPIE , vol.1720 , pp. 78
    • Vorburger, T.V.1    Song, J.F.2    Marx, E.3    Scace, B.R.4    Lettieri, T.R.5
  • 10
    • 0041907883 scopus 로고    scopus 로고
    • Surfanalyzer 2000, Federal Products Corporation, Providence, RI
    • Surfanalyzer 2000, Federal Products Corporation, Providence, RI
  • 11
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    • Step height measurements with a phase-shifting interference microscope
    • Raleigh, NC: American Society Precision Engineering
    • Hartman, A. W. and Vorburger, T. V. "Step height measurements with a phase-shifting interference microscope," Proc. ASPE 1990 Annual Conference, Raleigh, NC: American Society Precision Engineering, 1990, 63-66
    • (1990) Proc. ASPE 1990 Annual Conference , pp. 63-66
    • Hartman, A.W.1    Vorburger, T.V.2
  • 12
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    • Standard reference specimens in quality control of engineering surfaces
    • Song, J. F. and Vorburger, T. V. "Standard reference specimens in quality control of engineering surfaces," J Res of NIST, 96, 1991, 271
    • (1991) J Res of NIST , vol.96 , pp. 271
    • Song, J.F.1    Vorburger, T.V.2
  • 13
    • 0005373847 scopus 로고
    • Surface texture
    • Materials Park, OH: ASM International
    • Song J. F. and Vorburger, T. V. "Surface texture," in ASM Handbook, Vol. 18, Materials Park, OH: ASM International, 1992, pp. 334-345
    • (1992) ASM Handbook , vol.18 , pp. 334-345
    • Song, J.F.1    Vorburger, T.V.2
  • 14
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    • NIST Internal Memorandum
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  • 18
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    • On measuring the root-mean-square value of a finite record length periodic waveform
    • Teague, E. C. "On measuring the root-mean-square value of a finite record length periodic waveform," J Res NIST, 94, 1989, 367
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.