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Volumn 3, Issue , 2001, Pages 457-460

Model-order reduction of nonlinear MEMS devices through arclength-based Karhunen-Loeve decomposition

Author keywords

[No Author keywords available]

Indexed keywords

CIRCUIT SIMULATORS; KARHUNEN-LOEVE DECOMPOSITION; MICRO-ELECTRO-MECHANICAL; MICROMECHANICAL STRUCTURES; MODEL ORDER REDUCTION; NUMERICAL DYNAMICS; SIMULATION TIME; SYSTEM LEVEL SIMULATION;

EID: 0035000048     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISCAS.2001.921346     Document Type: Conference Paper
Times cited : (13)

References (12)
  • 2
    • 0032141012 scopus 로고    scopus 로고
    • CAD challenges for microsensors, microactuators, and microsystems
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    • S. D. Senturia "CAD Challenges for microsensors, microactuators, and microsystems", Proc. IEEE 86(8), pp. 1611-1626, 1998. (Pubitemid 128720267)
    • (1998) Proceedings of the IEEE , vol.86 , Issue.8 , pp. 1611-1626
    • Senturia, S.D.1
  • 3
    • 0002213943 scopus 로고    scopus 로고
    • Hierarchical design and test of integrated microsystems
    • G. K. Fedder "Hierarchical Design and Test of Integrated Microsystems", IEEE Design and Test vol. 16, no. 4, pp. 18-27.
    • IEEE Design and Test , vol.16 , Issue.4 , pp. 18-27
    • Fedder, G.K.1
  • 4
    • 0030091526 scopus 로고    scopus 로고
    • Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems
    • H. A. C. Tilmans, "Equivalent circuit representation of electromechanical transducers: I. Lumped-parameter systems [micromechanical systems]", J. Micromech. Microeng., vol. 6, no. 1, pp. 157-176, 1996. (Pubitemid 126614879)
    • (1996) Journal of Micromechanics and Microengineering , vol.6 , Issue.1 , pp. 157-176
    • Tilmans, H.A.C.1
  • 7
    • 0032594977 scopus 로고    scopus 로고
    • Generating efficient dynamical models for microelectromechanical systems from a few finite element simulation runs
    • Sept.
    • E. S. Hung and S. D. Senturia, "Generating efficient dynamical models for microelectromechanical systems from a few finite element simulation runs", Journal of Microelectromechanical System., pp. 280-289, Sept. 1999.
    • (1999) Journal of Microelectromechanical System. , pp. 280-289
    • Hung, E.S.1    Senturia, S.D.2
  • 9
    • 0026118040 scopus 로고
    • Harmonic response of silicon capacitive pressure sensor
    • DOI 10.1016/0924-4247(91)87008-Q
    • P. Pons and N. Ratier, "Harmonic response of silicon pressure sensor", Sensors and Actuators A., vol. 25-27, pp. 301-305, 1991. (Pubitemid 21714567)
    • (1991) Sensors and Actuators, A: Physical , vol.26 , Issue.1-3 , pp. 301-305
    • Pons, P.1    Blasquez, G.2    Ratier, N.3
  • 11
    • 0032069608 scopus 로고    scopus 로고
    • Nonlinear model reduction strategies for rapid thermal processing systems
    • PII S089465079802939X
    • S. Banerjee, J. V. Cole, and K. F. Jensen, "Nonlinear model reduction strategies for rapid thermal processing systems", IEEE Transactions on Semiconductor Manufacturing., pp. 266-75, 1998. (Pubitemid 128747852)
    • (1998) IEEE Transactions on Semiconductor Manufacturing , vol.11 , Issue.2 , pp. 266-275
    • Banerjee, S.1    Cole, J.V.2    Jensen, K.F.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.