Hierarchical Design and Test of Integrated Microsystems

IEEE Design and Test of Computers

Volumn 16, Issue 4, 1999, Pages 18-27

  Mukherjee, Tamal ^d   Fedder, Gary K ^a   Blanton, R D ^b,c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF MICHIGAN   (United States)

^c CARNEGIE MELLON UNIVERSITY   (United States)

^d NONE

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0002213943     PISSN: 07407475     EISSN: None     Source Type: Journal    
DOI: 10.1109/54.808200     Document Type: Article

References (11)

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3. D.A. Koester, R. Mahadevan, and K.W. Markus, Multi-User MEMS Processes (MUMPs): Introduction and Design Rules, available from MCNC MEMS Technology Applications Center, 3021 Cornwallis Road, Research Triangle Park, NC 27709, rev. 3, Oct. 1994, 39 pages.
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8. D. Teegarden, G. Lorenz, and R. Neul, "How to Model and Simulate Microgyroscope Systems," IEEE Spectrum, vol. 35, no. 7, pp. 67-75, July 1998.
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11. A. Kolpekwar, T. Jiang, and R.D. Blanton, "CARAMEL: Contamination And Reliability Analysis of MicroElectromechanical Layout," IEEE J. Microelectromechanical Systems, vol. 8, no. 3, Sept. 1999.