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Physica B: Condensed Matter

Volumn 302-303, Issue , 2001, Pages 180-187

Early stages of oxygen clustering in hydrogenated Cz-Si: IR absorption studies

(6) Murin, L I a Markevich, V P a Suezawa, M b Lindstrom J L c Kleverman, M c Hallberg, T d

a INSTITUTE OF SOLID STATE AND SEMICONDUCTOR PHYSICS (Belarus)

b TOHOKU UNIVERSITY (Japan)

c LUND UNIVERSITY (Sweden)

d SWEDISH DEFENCE RESEARCH AGENCY (Sweden)

Author keywords

Hydrogen; Infrared absorption spectroscopy; Oxygen clustering; Silicon

Indexed keywords

ABSORPTION SPECTROSCOPY; CRYSTAL GROWTH FROM MELT; DIFFUSION; DIMERS; DISSOCIATION; ELECTRON ENERGY LEVELS; HYDROGEN; HYDROGENATION; INFRARED SPECTROSCOPY; MOLECULAR VIBRATIONS; OXYGEN; SEMICONDUCTOR GROWTH;

INTERSTITIAL OXYGEN ATOMS;

SEMICONDUCTING SILICON;

EID: 0034988810 PISSN: 09214526 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-4526(01)00425-2 Document Type: Conference Paper

Times cited : (13)

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