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Volumn 258-263, Issue PART 1, 1997, Pages 391-398

Local vibrational modes of weakly bound O-H complexes in SI

Author keywords

Complexes; Hydrogen; Infrared absorption; Local modes; Oxygen; Silicon

Indexed keywords

ABSORPTION; ANNEALING; BINDING ENERGY; COMPUTATIONAL METHODS; HYDROGEN BONDS; ION IMPLANTATION; MOLECULAR VIBRATIONS; OXYGEN; SEMICONDUCTOR DOPING;

EID: 0001188875     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: None     Document Type: Article
Times cited : (26)

References (32)
  • 1
    • 0003371040 scopus 로고
    • Oxygen in silicon
    • Academic Press, New York, Vol. 42 and references therein
    • See e.g. Oxygen in silicon, Vol. 42 of Semiconductors and Semimetals, Ed. F. Shimura (Academic Press, New York, 1994) Vol. 42 and references therein.
    • (1994) Semiconductors and Semimetals , vol.42
    • Shimura, F.1
  • 2
    • 0002332827 scopus 로고    scopus 로고
    • Early Stages of Oxygen Precipitation in Silicon
    • Ser.3 17 Kluwer Academic Publishers, Dordrecht, and references therein
    • See e.g. Early Stages of Oxygen Precipitation in Silicon,Ser.3-Vol. 17 of NATO ASI Series, Ed. R. Jones (Kluwer Academic Publishers, Dordrecht, 1996) and references therein.
    • (1996) NATO ASI Series , vol.17
    • Jones, R.1
  • 3
    • 3743092304 scopus 로고
    • Defects in Semiconductors 16 Eds G. Davies, G.G. DeLeo and M. Stavola Trans Tech Publ., Zürich
    • R.C. Newman, J.H. Tucker, and S.A. McQuaid in "Defects in Semiconductors 16", Vol. 83-87 of Materials Science Forum, Eds G. Davies, G.G. DeLeo and M. Stavola (Trans Tech Publ., Zürich, 1992) p. 87.
    • (1992) Materials Science Forum , vol.83-87 , pp. 87
    • Newman, R.C.1    Tucker, J.H.2    McQuaid, S.A.3
  • 6
    • 0002332827 scopus 로고    scopus 로고
    • Early Stages of Oxygen Precipitation in Silicon, Ser.3 Ed. R. Jones Kluwer Academic Publishers, Dordrecht
    • R.C. Newman in "Early Stages of Oxygen Precipitation in Silicon",Ser.3-Vol. 17 of NATO ASI Series, Ed. R. Jones (Kluwer Academic Publishers, Dordrecht, 1996) p. 19.
    • (1996) NATO ASI Series , vol.17 , pp. 19
    • Newman, R.C.1
  • 8
    • 0000268553 scopus 로고
    • Defects in Semiconductors 16 Eds G. Davies, G.G. DeLeo and M. Stavola Trans Tech Publ., Zurich
    • R. Jones, S. Öberg, and A. Umerski in "Defects in Semiconductors 16", Vol. 83-87 of Materials Science Forum, Eds G. Davies, G.G. DeLeo and M. Stavola (Trans Tech Publ., Zurich, 1992) p. 551.
    • (1992) Materials Science Forum , vol.83-87 , pp. 551
    • Jones, R.1    Öberg, S.2    Umerski, A.3
  • 10
    • 0001978389 scopus 로고    scopus 로고
    • "Early Stages of Oxygen Precipitation in Silicon",Ser.3 Ed. R. Jones Kluwer Academic Publishers, Dordrecht
    • M. Ramamoorthy and S.T. Pantelides in "Early Stages of Oxygen Precipitation in Silicon",Ser.3-Vol. 17 of NATO ASI Series, Ed. R. Jones (Kluwer Academic Publishers, Dordrecht, 1996) p. 197.
    • (1996) NATO ASI Series , vol.17 , pp. 197
    • Ramamoorthy, M.1    Pantelides, S.T.2
  • 12
    • 0001688628 scopus 로고
    • Defects in Semiconductors 15 Ed. G. Ferenczi Trans Tech Publ. , Aedermannsdorf
    • B.N. Mukashev, M.F. Tamendarov, and S.Z. Tokmoldin in "Defects in Semiconductors 15", Vol. 38-41 of Materials Science Forum, Ed. G. Ferenczi (Trans Tech Publ. , Aedermannsdorf, 1989) p. 1039
    • (1989) Materials Science Forum , vol.38-41 , pp. 1039
    • Mukashev, B.N.1    Tamendarov, M.F.2    Tokmoldin, S.Z.3
  • 15
    • 18344412192 scopus 로고
    • Defects in Semiconductors 18 Eds. M. Suezawa and H. Katayama-Yoshida Trans Tech Publ., Zurich
    • V.P. Markevich, M. Suezawa, and K. Sumino in "Defects in Semiconductors 18", Vol. 196-201 of Materials Science Forum, Eds. M. Suezawa and H. Katayama-Yoshida (Trans Tech Publ., Zurich, 1995) p. 915
    • (1995) Materials Science Forum , vol.196-201 , pp. 915
    • Markevich, V.P.1    Suezawa, M.2    Sumino, K.3
  • 16
    • 0004876068 scopus 로고    scopus 로고
    • "Early Stages of Oxygen Precipitation in Silicon",Ser.3 Ed. R. Jones Kluwer Academic Publishers, Dordrecht
    • V.P. Markevich, I.F. Medvedeva, and L.I. Murin in "Early Stages of Oxygen Precipitation in Silicon",Ser.3-Vol. 17 of NATO ASI Series, Ed. R. Jones (Kluwer Academic Publishers, Dordrecht, 1996) p. 103
    • (1996) NATO ASI Series , vol.17 , pp. 103
    • Markevich, V.P.1    Medvedeva, I.F.2    Murin, L.I.3
  • 17
    • 3743100175 scopus 로고    scopus 로고
    • private communication
    • R.C. Newman, private communication
    • Newman, R.C.1
  • 19
    • 3743074541 scopus 로고    scopus 로고
    • To be published
    • To be published
  • 22
    • 3743055531 scopus 로고    scopus 로고
    • B. Hourahine, R. Jones, S. Öberg, and P. Briddon, this conference
    • B. Hourahine, R. Jones, S. Öberg, and P. Briddon, this conference.
  • 26
    • 0002800045 scopus 로고    scopus 로고
    • to be published
    • B. Bech Nielsen, L. Hoffmann, and M. Budde, Materials Science and Engineering B 36, 259 (1996), and B. Bech Nielsen, L. Hoffmann, and M. Budde, to be published
    • Bech Nielsen, B.1    Hoffmann, L.2    Budde, M.3
  • 32


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.