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Solid State Phenomena

Volumn 78-79, Issue , 2001, Pages 11-18

Single contact beam induced current phenomena - a review

(4) Chan, D S H a Phang, J C H a Chin, J M a Kolachina, S a

a Advanced Micro Devices (S) Pte Ltd (Singapore)

Author keywords

Integrated circuit failure analysis; Single contact electron beam induced currents; Single contact optical induced currents

Indexed keywords

ELECTRIC CURRENTS; ELECTRIC SPACE CHARGE; ELECTRON BEAMS; FAILURE ANALYSIS; SEMICONDUCTOR MATERIALS; VLSI CIRCUITS;

PULSED BEAM IRRADIATION; SINGLE CONTACT ELECTRON BEAM INDUCED CURRENTS; SINGLE CONTACT OPTICAL INDUCED CURRENTS;

ELECTRIC CONTACTS;

EID: 0034981054 PISSN: 10120394 EISSN: None Source Type: Book Series
DOI: 10.4028/www.scientific.net/ssp.78-79.11 Document Type: Conference Paper

Times cited : (5)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.