Recent results in ion beam induced charge microscopy: Unconnected junction contrast and an assessment of single contact IBIC

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 130, Issue 1-4, 1997, Pages 503-506

  Osipowicz, T ^a   Sanchez, J L ^a   Orlic I ^a   Watt, F ^a   Kolachina, S ^a   Ong, V K S ^a   Chan, D S H ^a   Phang, J C H ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CHARGE; HELIUM; IMAGING TECHNIQUES; ION BEAMS; ION BOMBARDMENT; MICROELECTRONICS; PROTONS; SEMICONDUCTOR JUNCTIONS;

ION BEAM INDUCED CHARGE (IBIC) MICROSCOPY;

MICROSCOPIC EXAMINATION;

EID: 0031548991     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00281-4     Document Type: Article

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