Low-cost post-CMOS integration of electroplated microstructures for inertial sensing

Sensors and Actuators, A: Physical

Volumn 83, Issue 1, 2000, Pages 93-100

  Wycisk, M ^a   Tonnesen T ^a   Binder, J ^a   Michaelis, S ^b   Timme, H J ^b  

^a UNIVERSITY OF BREMEN   (Germany)

^b INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; CMOS INTEGRATED CIRCUITS; ELECTRONICS PACKAGING; ELECTROPLATING; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR SWITCHES;

ACCELERATION SENSORS; THRESHOLD SWITCHES;

MICROSENSORS;

EID: 0343341656     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00295-8     Document Type: Article

References (8)

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7. T. Tönnesen, Mikromechanische Beschleunigungsschalter für Airbagsysteme, Dissertation, University of Bremen, 1998.
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