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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3008, Issue , 1997, Pages 100-110

Designs to improve polysilicon micromirror surface topology

(2) Burns, D M a Bright, V M a

a Air Force Institute of Technology (United States)

Author keywords

MEMS; Micromirror; Planarization

Indexed keywords

CROSSTALK; DISTORTION (WAVES); HOLOGRAPHY; INTERFEROMETRY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; OPTICAL IMAGE STORAGE; OPTICAL MICROSCOPY; OPTIMIZATION; SURFACE TOPOGRAPHY;

MICROMACHINED MICROMIRRORS; OPTICAL BEAM STEERING;

POLYSILICON;

EID: 0031350063 PISSN: 0277786X EISSN: None Source Type: Conference Proceeding
DOI: 10.1117/12.271405 Document Type: Conference Paper

Times cited : (11)

References (9)

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2
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.