SCOPUS 정보 검색 플랫폼

Volumn 80-81, Issue , 2001, Pages 237-242

Highly crystalline intrinsic microcrystalline silicon films using SiF4/Ar/H2 glow discharge plasma

(7) Kumar, S a Brenot, R a Kalache, B a Tripathi, V a Vanderhaghen, R a Drevillon, B a Roca i Cabarrocas, P a

a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES (France)

Author keywords

Microcrystalline silicon; Plasma deposition; Spectroscopic ellipsometry (SE); Thin film transistor

Indexed keywords

ACTIVATION ENERGY; CRYSTAL GROWTH; ELECTRIC CONDUCTIVITY MEASUREMENT; ELECTRON MOBILITY; ELLIPSOMETRY; GRAIN SIZE AND SHAPE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; SURFACE ROUGHNESS; X RAY DIFFRACTION ANALYSIS;

SILICON TETRAFLUORIDE; TIME RESOLVED MICROWAVE CONDUCTIVITY;

SILICON;

EID: 0034831964 PISSN: 10120394 EISSN: None Source Type: Book Series
DOI: None Document Type: Conference Paper

Times cited : (18)

References (18)

1
- 0344751778
- (1983) J. Non-Crystl. Solids , vol.59-60 , pp. 767
- Matsuda, A.¹

2
- 0000361527
- (1986) J. Appl. Phys. , vol.60 , pp. 1542
- Kumar, S.¹ Drevillon, B.² Godet, C.³

3
- 0000082886
- (1990) Appl. Phys. Lett. , vol.56 , pp. 533
- Asano, A.¹

4
- 0000598371
- (1995) Phys. Rev. , vol.52 B , pp. 5136
- Layadi, N.¹ Roca, P.² Cabarrocas, I.³ Drevillon, B.⁴ Solomon, I.⁵

5
- 0002139241
- (1999) Thin Solid Films , vol.337 , pp. 1
- Matsuda, A.¹

6
- 0024795078
- (1989) J. Non. Cryst. Solids , vol.114 , pp. 816
- Okada, Y.¹ Chen, J.² Campbell, I.H.³ Fauchet, P.M.⁴ Wagner, S.⁵

7
- 0030735122
- (1997) Solid State Commun. , vol.101 , pp. 17
- Ryu, B.Y.¹ Ryu, J.I.² Kim, H.C.³ Jang, J.⁴

8
- 0002086016
- (1999) Thin Solid Films , vol.337 , pp. 18
- Kamiya, T.¹ Nakahata, K.² Miida, A.³ Fortmann, C.M.⁴ Shimizu, I.⁵

9
- 0000505794
- and elsewhere in these proceedings
- (1999) J. Appl. Phys. , vol.86 , pp. 7079
- Roca i Cabarrocas, P.¹ Brenot, R.² Bulkin, P.³ Vanderhaghen, R.⁴ Drevillon, B.⁵ French, I.⁶

10
- 0000358828
- (1994) Appl. Phys. Lett. , vol.65 , pp. 2588
- Finger, F.¹ Hapke, P.² Luysberg, M.³ Carius, R.⁴ Wagner, H.⁵ Scheib, M.⁶

11
- 0000905671
- (2000) J. Appl. Phys. , vol.88 , pp. 576
- Sumiya, S.¹ Mizutani, Y.² Yoshida, R.³ Hori, M.⁴ Goto, T.⁵ Ito, M.⁶ Tsukuda, T.⁷ Samukawa, S.⁸

12
- 0000572781
- (2000) J. Appl. Phys. , vol.88 , pp. 3310
- Kamiya, T.¹ Nakahata, K.² Sameshima, T.³ Watanabe, T.⁴ Mouri, T.⁵ Shimizu, I.⁶

13
- 0027882071
- (1993) Prog. Cryst. Growth Charact. Mater. , vol.27 , pp. 1
- Drévillon, B.¹

14
- 0033521293
- (1999) Appl. Phys. Lett. , vol.74 , pp. 58
- Brenot, R.¹ Vanderhaghen, R.² Drévillon, B.³ Roca i Cabarrocas, P.⁴

15
- 0001642363
- (2000) Phys. Rev. , vol.61 B , pp. 10832
- Fujiwara, H.¹ Koh, J.² Rovira, P.I.³ Collins, R.W.⁴

16
- 36449006678
- (1993) Appl. Phys. Lett. , vol.62 , pp. 3348
- Jellison G.E., Jr.¹ Chisholm, M.F.² Gorbatkin, S.M.³

17
- 0032614007
- (1999) Appl. Phys. Lett. , vol.75 , pp. 492
- Yue, G.¹ Lorentzen, J.D.² Lin, J.³ Han, D.⁴ Wang, Q.⁵

18
- 84902956267
- Ph.D. Thesis, Ecole Polytechnique, Palaiseau; (unpublished)
- (2000)
- Brenot, R.¹

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