Plasma immersion ion implantation of pure aluminium at elevated temperatures

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 873-878

  Blawert, C ^a   Mordike, B L ^a  

^a CLAUSTHAL UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Aluminium; Aluminium nitride; Plasma Immersion Ion Implantation; Wear

Indexed keywords

ANNEALING; CORROSION RESISTANCE; HARDNESS; ION IMPLANTATION; NITRIDES; OXYGEN; PLASMA APPLICATIONS; THERMAL DIFFUSION IN SOLIDS; THERMAL EFFECTS; WEAR OF MATERIALS;

DIFFUSION ZONE; PLASMA IMMERSION ION IMPLANTATION (PIII);

ALUMINUM;

EID: 0031547880     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00065-7     Document Type: Article

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