SEM performance evaluation using the sharpness criterion

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2725, Issue , 1996, Pages 504-514

  Postek, Michael T ^a   Vladar, Andras E ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASTIGMATISM; CRITICAL DIMENSION METROLOGY; SHARPNESS CRITERIA;

AUTOMATION; DISTANCE MEASUREMENT; INSPECTION; OPTIMIZATION; PERFORMANCE; SEMICONDUCTOR DEVICE MANUFACTURE;

SCANNING ELECTRON MICROSCOPY;

EID: 0029728395     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (19)