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Volumn 22, Issue 2, 2000, Pages 110-111
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SMART-routines to measure SEM resolution and performance
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Author keywords
[No Author keywords available]
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Indexed keywords
CARBON;
FOURIER TRANSFORMS;
IMAGE PROCESSING;
THIN FILMS;
CROSS CORRELATION FUNCTION;
SCANNING MICROSCOPE ANALYSIS AND RESOLUTION TESTING;
SCANNING ELECTRON MICROSCOPY;
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EID: 0034156212
PISSN: 01610457
EISSN: None
Source Type: Journal
DOI: None Document Type: Article |
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Times cited : (1)
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References (4)
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