Statistical measure for the sharpness of SEM images

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3050, Issue , 1997, Pages 375-387

  Zhang, Nien Fan ^a   Postek Jr , Michael T ^a   Larrabee, Robert D ^a   Vladar, Andras E ^b   Keery, William J ^a   Jones, Samuel N ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^b HEWLETT PACKARD COMPANY   (United States)

Author keywords

Fourier transform; Image analysis; Kurtosis; Metrology; Scanning electron microscope; Sharpness

Indexed keywords

ELECTRON MICROSCOPES; FOURIER ANALYSIS; IMAGE ANALYSIS; INSTRUMENT TESTING; MATHEMATICAL TRANSFORMATIONS; MEASUREMENTS; PROBABILITY DENSITY FUNCTION; PROBABILITY DISTRIBUTIONS; PROCESS CONTROL; QUALITY ASSURANCE; QUALITY FUNCTION DEPLOYMENT; SCANNING; SCANNING ELECTRON MICROSCOPY; TOTAL QUALITY MANAGEMENT;

BIVARIATE KURTOSIS; HIGH SPATIAL FREQUENCIES; KURTOSIS; METROLOGY; MULTIVARIATE KURTOSIS; SCANNING ELECTRON MICROSCOPE; SECOND MOMENTS; SEM IMAGES; SEM METROLOGIES; SEMI-AUTOMATED; SEMICONDUCTOR PRODUCTIONS; SHARPNESS; SPATIAL FOURIER TRANSFORMS; STATISTICAL MEASURES; TWO-DIMENSIONAL;

FOURIER TRANSFORMS;

EID: 0003151349     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.275935     Document Type: Conference Paper

References (10)

1. Contribution of the National Institute of Standards and Technology (formerly the National Bureau of Standards) Not subject to copyright.
2. Certain commercial equipment is identified in this report to adequately describe the experimental procedure. Such identification does not imply recommendation or endorsement by the National Institute of Standards and Technology, nor does it imply that the equipment identified is necessarily the best available for the purpose.
3. Dodson, T. A. and Joy, D. C. 1990. Fast Fourier transform techniques for measuring SEM resolution. Proc. XIIth Int. Congress for EM. San Francisco Press. 406-407.
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