Survey of scanning electron microscopes using quantitative resolution evaluation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3050, Issue , 1997, Pages 80-92

  Fanget, Gilles L ^a   Martin, Hervé M ^b   Florin, Brigitte ^a  

^a CEA LETI   (France)

^b ORANGE LABS   (France)

Author keywords

Critical Dimension (CD); Microporous silicon; Resolution; Scanning Electron Microscope (SEM); Two Dimensions Fast Fourier Transform (2D FFT)

Indexed keywords

DATA STORAGE EQUIPMENT; ELECTRON MICROSCOPES; ELECTRONS; FAST FOURIER TRANSFORMS; IMAGE ANALYSIS; MICROPOROSITY; POROUS SILICON; SCANNING; SCANNING ELECTRON MICROSCOPY;

CRITICAL DIMENSION (CD); MICROPOROUS SILICON; RESOLUTION; SCANNING ELECTRON MICROSCOPE (SEM); TWO DIMENSIONS FAST FOURIER TRANSFORM (2D FFT);

PROCESS CONTROL;

EID: 0010361534     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.275930     Document Type: Conference Paper

References (9)

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