Benchmarking semiconductor manufacturing

IEEE Transactions on Semiconductor Manufacturing

Volumn 9, Issue 2, 1996, Pages 158-169

  Leachman, Robert C ^b   Hodges, David A ^a,b  

^a IEEE

^b University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INDUSTRIAL PLANTS; INFORMATION TECHNOLOGY; PERFORMANCE; PERSONNEL; PRODUCTION CONTROL; PRODUCTIVITY; SOCIETIES AND INSTITUTIONS;

INFORMATION SYSTEMS; ORGANIZATIONAL PRACTICES; SEMICONDUCTOR WAFER FABRICATION PLANTS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030150366     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/66.492810     Document Type: Article

References (5)

1. R. Leachman, Ed., The Competitive Semiconductor Manufacturing Survey: Second Report on Results of the Main Phase, Rep. CSM-08, Eng. Syst. Res. Center, Univ. of California, Berkeley, Sept. 1994. (Report will be sent at no charge in response to email request to kbowers@esrc1.berkeley.edu or FAX to CSM at 510-642-1403.)
2. M. Kelly et al., Electronic Manufacturing and Packaging in Japan, JTEC Panel Report, Int. Technol. Res. Inst., Loyola College, Baltimore, MD, forthcoming, 1995.
3. Womak, Jones, and Roos, The Machine that Changed the World, Rawson Associates, 1990.
4. C. Brown, Ed., The Competitive Semiconductor Manufacturing Human Resources Project, Rep. CSM-09, Eng. Syst. Res. Center, Univ. of California, Berkeley, Sept. 1994. (Report will be sent at no charge in response to email request to kbowers@esrc1.berkeley.edu or FAX to CSM at 510-642-1403.)
5. M. Parikh and U. Kaempf, "SMIF: A technology for wafer cassette transfer in VLSI manufacturing," Solid State Technol., vol. 27, no. 7, p. 111, July 1984.