Photon and ion beam assisted deposition of titanium nitride

Applied Surface Science

Volumn 99, Issue 4, 1996, Pages 313-318

  Wengenmair, H ^a   Gerlach, J W ^a   Preckwinkel, U ^a   Stritzker, B ^a   Rauschenbach, B ^a  

^a UNIVERSITY OF AUGSBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ATOMIC STRUCTURE; CRYSTAL ORIENTATION; DEPOSITION; FILM GROWTH; FILM PREPARATION; INTERFACIAL ENERGY; ION BOMBARDMENT; TRANSMISSION ELECTRON MICROSCOPY; ULTRAVIOLET RADIATION; X RAY DIFFRACTION ANALYSIS;

ELASTIC RECOIL DETECTION; PHOTON ION BEAM ASSISTED DEPOSITION (PHIBAD) SYSTEM;

TITANIUM NITRIDE;

EID: 0030212116     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/0169-4332(96)00102-X     Document Type: Article

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