Heteroepitaxial diamond nucleation and growth on silicon by microwave plasma-enhanced chemical vapor deposition synthesis

Diamond and Related Materials

Volumn 9, Issue 11, 2000, Pages 1840-1849

  Guo, X J ^a   Sung, S L ^a   Lin, J C ^a   Chen, F R ^a   Shih, H C ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EPITAXIAL GROWTH; HIGH RESOLUTION ELECTRON MICROSCOPY; HYDROGEN; INTERFACES (MATERIALS); METHANE; MORPHOLOGY; NUCLEATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY;

HETEROEPITAXIAL DIAMOND FILMS; LAUE CIRCLE THEORY;

DIAMOND FILMS;

EID: 0034324317     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00332-0     Document Type: Article

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