Sputter-induced cone and filament formation on InP and AFM tip shape determination

Surface and Interface Analysis

Volumn 29, Issue 11, 2000, Pages 782-790

  Seah, M P ^a   Spencer, S J ^a   Cumpson, P J ^a   Johnstone, J E ^a  

^a NATIONAL PHYSICAL LABORATORY   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; DIFFUSION; FILM GROWTH; ION BEAMS; ORGANIC COATINGS; PLASTIC COATINGS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING INDIUM PHOSPHIDE; SPUTTER DEPOSITION; STRAIN; THERMAL EFFECTS;

FILAMENTARY GROWTH;

SURFACE PHENOMENA;

EID: 0034321156     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/1096-9918(200011)29:11<782::AID-SIA929>3.0.CO;2-1     Document Type: Article

References (38)

1. Hofmann S. In Practical Surface Analysis, Vol 1: Auger and X-ray Photoelectron Spectroscopy, Briggs D, Seah MP (eds). Wiley: Chichester, 1990; 143.
2. Wittmaack K. In Practical Surface Analysis, Vol 2: Ion and Neutral Spectroscopy, Briggs D, Seah MP (eds). Wiley: Chichester, 1992; 105.
3. Messier R, Krishnaswamy SV, Walker PL. Carbon 1982; 20: 29.
4. Stewart ADG, Thompson MW. J. Mater. Sci. 1969; 4: 56.
5. Whitton JL, Carter G, Nobes MJ, Williams JS. Radiat. Eff. 1977; 32: 129.
6. Navinsek B. Prog. Surf. Sci. 1976; 7: 49.
7. Carter G, Colligon JS, Nobes MJ. Radiat. Eff. 1977; 31: 65.
8. Ducommun JP, Cantagrel M, Moulin M. J. Mater. Sci. 1975; 10: 52.
9. Vasiliu F, Frunza S. J. Mater. Sci. Lett. 1983; 2: 249.
10. Smith R, Tagg MA, Walls JM. Vacuum 1984; 34: 175.
11. Wehner GK, Hajicek DJ. J. Appl. Phys. 1971; 42: 1145.
12. Wehner GK. J. Vac. Sci. Technol. A 1985; 3: 1821.
13. Ishikawa K, Hamasaki S, Goto K. Jpn. J. Appl. Phys. 1983; 22: L547.
14. Seah MP, Kuhlein M. Surf. Sci. 1985; 150: 273.
15. Sobue S, Okuyama F. J. Vac. Sci. Technol. A 1990; 8: 785.
16. Zalar A. Thin Solid Films 1985; 124: 223.
17. Zalar A. Surf. Interface Anal. 1986; 9: 41.
18. Malherbe JB. Crit. Rev. Solid State Mater. Sci. 1994; 19: 55.
19. Malherbe JB. Crit Rev. Solid State Mater. Sci. 1994; 19: 129.
20. Gries WH. Surf. Interface Anal. 1989; 14: 611.
21. Malherbe JB, Lakner H, Gries WH. Surf. Interface Anal. 1991; 17: 719.
22. MacLaren SW, Baker JE, Finnegan NL, Laxton CM. J. Vac. Sci. Technol. A 1992; 10: 468.
23. Okuyama F, Kato J. J. Vac. Sci. Technol. B 1994; 12: 3054.
24. Demanet CM, Sankar KV, Malherbe JB, van der Berg NG, Odendaal RQ. Surf. Interface Anal. 1996; 24: 497.
25. Seah MP. J. Electron. Spectrosc. 2000; 109: 291.
26. Stedman M. J. Microsc. 1988; 152: 611.
27. ASTM E1813-96 Standard Practice for Measuring and Reporting Probe Tip Shape in Scanning Probe Microscopy. ASTM: West Conshohocken, PA, 1996.
28. Villarrubia JS. J. Res. Nat. Inst. Stand. Technol. 1997; 102: 425.
29. Keller DJ, Franke FS. Surf. Sci. 1993; 294: 409.
30. Villarrubia JS. Surf. Sci. 1994; 321: 287.
31. Atamny F, Baiker A. Surf. Sci. Lett. 1995; 323: L314.
32. Markiewicz P, Goh MC. Rev. Sci. Instrum. 1995; 66: 3186.
33. Bykov V, Gologanov A, Shevyakov V. Appl. Phys. A 1998; 66: 499.
34. Vesenka J, Manne S, Giberson R, Marsh T, Henderson E. Biophys. J. 1993; 65: 1.
35. Garcia VJ, Martinez L, Briceno-Valero JM, Schilling CH, Probe Microsc. 1998; 1: 117.
36. Garcia V, Martinez L, Briceno-Valero JM, Schilling CH. Probe Microsc. 1998; 1: 107.
37. Ramirez-Aguilar KA, Rowlen KL. Langmuir 1998; 14: 2563.
38. Williams PM, Davies MC, Roberts CJ, Tendler SJB. Appl. Phys. A 1998; 66: S911.