A low-pressure encapsulated resonant fluid density sensor with feedback control electronics

Measurement Science and Technology

Volumn 11, Issue 3, 2000, Pages 205-211

  Corman, Thierry ^a,b   Enoksson, Peter ^a   Norén, Kjell ^a   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b ACREO AB   (Sweden)

Author keywords

'Burst' technology; Capacitive detection; Density sensor; Electrostatic excitation; Low pressure encapsulation; Q factor

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; CROSSTALK; ELECTROSTATICS; ENCAPSULATION; FEEDBACK CONTROL; MICROMACHINING; SENSORS;

CAPACITIVE DETECTION; ELECTROSTATIC EXCITATION; FLUID DENSITY SENSORS;

Q FACTOR MEASUREMENT;

DENSITY; FEEDBACK; SENSOR;

EID: 0033993838     PISSN: 09570233     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-0233/11/3/306     Document Type: Article

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