Design, fabrication and characterization of a highly symmetrical capacitive triaxial accelerometer

Sensors and Actuators, A: Physical

Volumn 66, Issue 1-3, 1998, Pages 205-212

  Lötters, Joost C ^a   Bomer, Johan G ^b   Verloop, Anton J ^b   Droog, Ed A ^c   Olthuis, Wouter ^b   Veltink, Peter H ^c   Bergveld, Peit ^b  

^a Bronkhorst High Tech BV   (Netherlands)

^b UNIVERSITY OF TWENTE   (Netherlands)

^c UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Biomedical applications; Capacitive sensors; Three dimensional structures; Triaxial accelerometers

Indexed keywords

BIOSENSORS; CAPACITORS; MATHEMATICAL MODELS; POLYIMIDES; SILICONES;

TRIAXIAL ACCELEROMETERS;

ACCELEROMETERS;

EID: 0032047212     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00036-3     Document Type: Article

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