Low-pressure-encapsulated resonant structures with integrated electrodes for electrostatic excitation and capacitive detection

Sensors and Actuators, A: Physical

Volumn 66, Issue 1-3, 1998, Pages 160-166

  Corman, Thierry ^a   Enoksson, Peter ^a   Stemme, Göran ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Capacitive detection; Electrostatic excitation; Lateral electrical feedthrough; Low pressure encapsulation; Q factor

Indexed keywords

ELECTRODES; MICROMACHINING; Q FACTOR MEASUREMENT; SILICON WAFERS; SUBSTRATES;

ELECTROSTATIC EXCITATION; LATERAL ELECTRICAL FEEDTHROUGH; LOW PRESSURE ENCAPSULATED RESONANT STRUCTURES;

SENSORS;

EID: 0032049404     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)80019-8     Document Type: Article

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