A combined piezoresistive/capacitive pressure sensor with self-test function based on thermal actuation

Sensors and Actuators, A: Physical

Volumn 66, Issue 1-3, 1998, Pages 70-75

  De Bruyker, Dirk ^a   Cozma, Adriana ^a   Puers, Robert ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

Pressure sensors; Self test; Thermal actuators

Indexed keywords

ACTUATORS; PIEZOELECTRIC TRANSDUCERS; STRESS ANALYSIS;

COMBINED PIEZORESISTIVE/CAPACITIVE PRESSURE SENSORS; SELF TEST FUNCTION; THERMAL ACTUATORS;

PRESSURE TRANSDUCERS;

EID: 0032048646     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01718-4     Document Type: Article

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