Photolithographic packaging of silicon pressure sensors

Sensors and Actuators, A: Physical

Volumn 66, Issue 1-3, 1998, Pages 279-283

  Krassow, Heiko ^a,b   Campabadal, Francesca ^a   Lora Tamayo, Emilio ^a  

^a CSIC   (Spain)

^b INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

Author keywords

FEM simulation; Packaging; Photolithography; Pressure sensors; Silicone

Indexed keywords

COMPUTER SIMULATION; ELASTIC MODULI; ELECTRONICS PACKAGING; ENCAPSULATION; FINITE ELEMENT METHOD; MICROELECTRONICS; PHOTOLITHOGRAPHY; PIEZOELECTRIC DEVICES; SILICON SENSORS; SILICONES;

SOFT MOUNTING TECHNIQUES;

PRESSURE TRANSDUCERS;

EID: 0032047246     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01710-X     Document Type: Article

References (7)

1. J. Muñoz, A. Bratov, R. Mas, N. Abramova, C. Domínguez, J. Bartrolí, Packaging of ISFETs at the wafer level by photopatternable encapsulant resins, Tech. Digest, 8th Int. Conf. Solid-State Sensors and Actuators (Transducers '95/Eurosensors IX), Stockholm, Sweden, 25-29 June, 1995, pp. 248-251.
2. G. Pfeifer, R. Werthschützky, Drucksensoren, VEB Verlag Technik, Berlin, 1989, p. 249.
3. Pressure sensor device data, Motorola Inc., 1994.
4. K. Dyrbye, T. Romedahl Brown, G.F. Eriksen, Packaging of physical sensors for aggressive media applications, 6th Workshop on Micromachining, Micromechanics and Microsystems, MME '95, Copenhagen, Denmark, 3-5 Sept., 1995, pp. 315-323.
5. H. Krassow, F. Campabadal, E. Lora-Tamayo, Medidor de caudal de elemento estrangulador con microsensor de presión incorporado, Spanish Patent Pending, No. 9 602 679 (Dec. 1996).
6. H. Krassow, F. Campabadal, E. Lora-Tamayo, Flow restriction device with incorporated silicon pressure sensor for pressure-based flow-meters, Proc. 8th Int. Fair and Congress for Sensors. Transducers and Systems: SENSOR '97, Nuremberg, Germany, 13-15 May, 1997, Vol. 3, pp. 159-164.
7. H. Krassow, D. Heimlich, F. Campabadal, E. Lora-Tamayo, Novel packaging technique and its application to a wet/wet differential pressure silicon sensor, Tech. Digest, 9th Int. Conf. Solid-State Sensors and Actuators (Transducers '97), Chicago, IL, USA, 16-19 June, 1997, Vol. 1, pp. 275-278.