Investigation of the electron emission from pores in a diamond porous membrane

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 5, 2000, Pages 2415-2419

  Mammana, V P ^a   Anders, S ^b,c   Monteiro, O R ^b   Salvadori, M C ^a  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^c IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; ELECTRON EMISSION; ENERGY DISPERSIVE SPECTROSCOPY; IMAGE ANALYSIS; IMAGE QUALITY; POROUS MATERIALS; VACUUM APPLICATIONS;

DIAMOND POROUS MEMBRANES; PHOTOEMISSION ELECTRON MICROSCOPY;

DIAMOND FILMS;

EID: 0034266758     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1288133     Document Type: Article

References (25)

1. I. Brodie and C. A. Spindt, Adv. Electron. Electron Phys. 83, 1 (1992).
2. D. Temple, Mater. Sci. Eng., R. 24, 185 (1999).
3. B. R. Johnson, A. I. Akinwande, and D. Murphy, J. Vac. Sci. Technol. B 15, 535 (1997).
4. J. G. Fleming, D. A. A. Ohlberg, T. Felter, and M. Malinowski, J. Vac. Sci. Technol. B 14, 1958 (1996).
5. O. Gröning, O. M. Küttet, P. Gröning, and L. Schlapbach, Appl. Phys. Lett. 71, 2253 (1997).
6. Z. Feng, I. G. Brown, and J. W. Ager III, J. Mater. Res. 10, 1585 (1995).
7. F. Y. Chuang, H. F. Cheng, C. Y. Sun, and I. N. Lin, J. Vac. Sci. Technol. B 15, 2072 (1997).
8. D. S. Mao et al., Diamond Relat. Mater. 8, 52 (1999).
9. F. Y. Chuang, W. C. Wang, F. Cheng, C. Y. Sun, and I. N. Lin, J. Vac. Sci. Technol. B 15, 2072 (1997).
10. V. V. Zhirnov and J. J. Hren, Mater. Res. Bull. 23, 42 (1998).
11. V. V. Zhirnov, A. B. Voronin, E. I. Givargizov, and A. L. Meshcheryakova, J. Vac. Sci. Technol. B 14, 2034 (1996).
12. T. K. Ku et al., Thin Solid Films 290/291, 176 (1996).
13. P. H. Holloway, J. Sebastian, T. Trottier, S. Jones, H. Swart, and R. O. Petersen, Symposium H, Flat Panel Display Materials, Spring Meeting Symposium Proceedings (Materials Research Society, Pittsburgh, 1996).
14. V. P. Mammana, F. T. Degasperi, O. R. Monteiro, J. H. Vuolo, M. C. Salvadori and I. G. Brown, J. Vac. Sci. Technol. A 18, 1818 (2000).
15. V. P. Mammana, R. D. Mansano, P. Verdonck, A. Pavani, and M. C. Salvadori, Diamond Relat. Mater. 6, 1824 (1997).
16. V. P. Mammana, M. C. Salvadori, and I. G. Brown, Thin Solid Films 308/309, 281 (1997).
17. M. C. Salvadori, M. Cattani, V. Mammana, O. R. Monteiro, J. W. Ager, and I. G. Brown, Thin Solid Films 290/291, 157 (1996).
18. V. P. Mammana, S. Silva, R. D. Mansano, P. Verdonck, A. Pavani, M. C. Salvadori, and I. G. Brown, Thin Solid Films 353, 239 (1999).
19. Ian Brown, Annu. Rev. Mater. Sci. 28, 243 (1998).
20. O. R. Monteiro, M. C. Salvadori, M. Cattani, V. Mammana, and I. G. Brown, Thin Solid Films 308/309, 235 (1997).
21. S. Anders, A. Anders, M. R. Dickinson, R. A. MacGill, and I. G. Brown, IEEE Trans. Plasma Sci. 25, 670 (1997).
22. S. Anders et al. Rev. Sci. Instrum. 70, 3973 (1999).
23. H. Noguchi et al., J. Vac. Sci. Technol. B 16, 2772 (1998).
24. V. J. Trava-Airoldi, E. J. Corat, A. F. V. Pena, N. F. Leite, V. Baranauskas, and M. C. Salvadori, Diamond Relat. Mater. 4, 1255 (1995).
25. S. Dimitrijevic, J. C. Withers, V. P. Mammana, O. R. Monteiro, J. W. Ager III, and I. G. Brown, Appl. Phys. Lett. 75, 2680 (1999).