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Thin Solid Films

Volumn 317, Issue 1-2, 1998, Pages 326-329

Preparation of transparent conducting Zn2In2O5 films by d.c. magnetron sputtering

(4) Minami, T a Kakumu, T a Takeda, Y a Takata, S a

a KANAZAWA INSTITUTE OF TECHNOLOGY (Japan)

Author keywords

Etching; Films; Magnetron sputtering

Indexed keywords

ELECTRIC CONDUCTIVITY; ETCHING; FILM PREPARATION; HYDROCHLORIC ACID; MAGNETRON SPUTTERING; OXIDES; SOLUTIONS; SUBSTRATES; THERMAL EFFECTS; TRANSPARENCY;

PLANAR MAGNETRON SPUTTERING; TRANSPARENT CONDUCTING OXIDE FILMS;

CONDUCTIVE FILMS;

EID: 0032046559 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(97)00548-8 Document Type: Article

Times cited : (25)

References (13)

1
- 0029533795
- T. Minami, S. Takata, T. Kakumu, H. Sonohara, Thin Solid Films 270 (1995) 22.
- (1995) Thin Solid Films , vol.270 , pp. 22
- Minami, T.¹ Takata, S.² Kakumu, T.³ Sonohara, H.⁴

2
- 0000985329
- T. Minami, T. Kakumu, S. Takata, J. Vac. Sci. Technol. A14 (1996) 1704.
- (1996) J. Vac. Sci. Technol. , vol.A14 , pp. 1704
- Minami, T.¹ Kakumu, T.² Takata, S.³

3
- 0001730853
- T. Minami, T. Kakumu, S. Takata, J. Vac. Sci. Technol. A14 (1996) 1689.
- (1996) J. Vac. Sci. Technol. , vol.A14 , pp. 1689
- Minami, T.¹ Kakumu, T.² Takata, S.³

4
- 84990658241
- H. Enoki, T. Nakayama, J. Echigoya, Phys. Status Solidi A 129 (1992) 181.
- (1992) Phys. Status Solidi A , vol.129 , pp. 181
- Enoki, H.¹ Nakayama, T.² Echigoya, J.³

5
- 0011166783
- H. Un'no, N. Hikuma, T. Omata, N. Ueda, T. Hashimoto, K. Yanagawa, Y. Ohki, T. Omata, H. Hosono, N. Ueda, H. Kawazoe, Jpn. J. Appl. Phys. 32 (1993) L1693.
- (1993) Jpn. J. Appl. Phys. , vol.32
- Un'no, H.¹ Hikuma, N.² Omata, T.³ Ueda, N.⁴ Hashimoto, T.⁵ Yanagawa, K.⁶ Ohki, Y.⁷ Omata, T.⁸ Hosono, H.⁹ Ueda, N.¹⁰ Kawazoe, H.¹¹

6
- 0001508683
- T. Minami, H. Sonohara, S. Takata, H. Sato, Jpn. J. Appl. Phys. 33 (1994) L1693.
- (1994) Jpn. J. Appl. Phys. , vol.33
- Minami, T.¹ Sonohara, H.² Takata, S.³ Sato, H.⁴

7
- 36448999331
- J.M. Philips, J. Kwo, G.A. Thomas, S.A. Carter, R.J. Cava, S.Y. Hou, J.J. Krajewski, J.H. Marshall, W.F. Peck, D.H. Rapkine, R.B. van Dover, Appl. Phys. Lett. 65 (1994) 115.
- (1994) Appl. Phys. Lett. , vol.65 , pp. 115
- Philips, J.M.¹ Kwo, J.² Thomas, G.A.³ Carter, S.A.⁴ Cava, R.J.⁵ Hou, S.Y.⁶ Krajewski, J.J.⁷ Marshall, J.H.⁸ Peck, W.F.⁹ Rapkine, D.H.¹⁰ Van Dover, R.B.¹¹

8
- 0001529136
- K. Yanagawa, Y. Ohki, T. Omata, H. Hosono, N. Ueda, H. Kawazoe, Appl. Phys. Lett. 65 (1994) 406.
- (1994) Appl. Phys. Lett. , vol.65 , pp. 406
- Yanagawa, K.¹ Ohki, Y.² Omata, T.³ Hosono, H.⁴ Ueda, N.⁵ Kawazoe, H.⁶

9
- 0029356624
- T. Minami, H. Sonohara, T. Kakumu, S. Takata, Jpn. J. Appl. Phys. 34 (1995) L971.
- (1995) Jpn. J. Appl. Phys. , vol.34
- Minami, T.¹ Sonohara, H.² Kakumu, T.³ Takata, S.⁴

10
- 21844511608
- T. Minami, S. Takata, H. Sato, H. Sonohara, J. Vac. Sci. Technol. A13 (1995) 1095.
- (1995) J. Vac. Sci. Technol. , vol.A13 , pp. 1095
- Minami, T.¹ Takata, S.² Sato, H.³ Sonohara, H.⁴

11
- 0000876821
- T. Minami, H. Sato, H. Imamoto, S. Takata, Jpn. J. Appl. Phys. 31 (1992) L257.
- (1992) Jpn. J. Appl. Phys. , vol.31
- Minami, T.¹ Sato, H.² Imamoto, H.³ Takata, S.⁴

12
- 0021215908
- T. Minami, H. Nanto, S. Shooji, S. Takata, Thin Solid Films 111 (1984) 167.
- (1984) Thin Solid Films , vol.111 , pp. 167
- Minami, T.¹ Nanto, H.² Shooji, S.³ Takata, S.⁴

13
- 0027107604
- T. Minami, H. Sato, K. Ohashi, T. Tomofuji, S. Takata, J. Crystal Growth 117 (1992) 370.
- (1992) J. Crystal Growth , vol.117 , pp. 370
- Minami, T.¹ Sato, H.² Ohashi, K.³ Tomofuji, T.⁴ Takata, S.⁵

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