Design and noise consideration of an accelerometer employing modulated integrative differential optical sensing

Sensors and Actuators, A: Physical

Volumn 84, Issue 1, 2000, Pages 53-64

  Bochobza Degani, Ofir ^a   Seter, Dan J ^b   Socher, Eran ^a   Nemirovsky, Yael ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

^b RAFAEL   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; FABRICATION; MICROMACHINING; OPTICAL SENSORS; PHOTODIODES;

MECHANICAL STRUCTURE; MODULATED INTEGRATIVE DIFFERENTIAL OPTICAL SENSING; NOISE EQUIVALENT ACCELERATION; OPEN LOOP; OPTIMAL DESIGN;

ACCELEROMETERS;

EID: 0034249305     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00357-X     Document Type: Article

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