Simple technology for bulk accelerometer based on bond and etch back silicon on insulator wafers

Sensors and Actuators, A: Physical

Volumn 68, Issue 1-3, 1998, Pages 299-302

  Plaza, J A ^a   Esteve, J ^a   Lora Tamayo, Emilio ^a  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

Author keywords

Accelerometers; BESOI; Triaxial accelerometers

Indexed keywords

ACCELEROMETERS; DRY ETCHING; FABRICATION; MASKS; SILICON WAFERS;

BOND AND ETCH BACK SILICON ON INSULATOR WAFERS; TRIAXIAL ACCELEROMETER;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0041636178     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00022-3     Document Type: Article

References (7)

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