Synthesis of stoichiometric zirconium nitride by d.c. reactive magnetron sputtering pulsed at low frequency: Characterization by ESCA, SIMS and electron microprobe

Surface and Interface Analysis

Volumn 30, Issue 1, 2000, Pages 607-611

  Dauchot, J P ^a   Gouttebaron, R ^a   Cornelissen, D ^a   Wautelet, M ^a   Hecq, M ^a  

^a MATERIA NOVA RESEARCH CENTER   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY OF SOLIDS; MAGNETRON SPUTTERING; SCANNING ELECTRON MICROSCOPY; SECONDARY ION MASS SPECTROMETRY; SYNTHESIS (CHEMICAL); X RAY PHOTOELECTRON SPECTROSCOPY; ZIRCONIUM COMPOUNDS;

ELECTRON MICROPROBE; PULSED DISCHARGE CURRENT; ZIRCONIUM NITRIDE;

CERAMIC COATINGS;

EID: 0034245114     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/1096-9918(200008)30:1<607::AID-SIA860>3.0.CO;2-6     Document Type: Article

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