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Volumn 13, Issue 8, 1998, Pages 2117-2122
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Influence of nitrogen implantation on the properties of Ti and substoichiometric TiNx films deposited on high speed steel
a a b c b a |
Author keywords
[No Author keywords available]
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Indexed keywords
HARDNESS;
ION IMPLANTATION;
SPUTTERING;
STEEL;
SUBSTRATES;
TITANIUM;
TITANIUM NITRIDE;
X RAY DIFFRACTION ANALYSIS;
REACTIVE SPUTTERING;
THIN FILMS;
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EID: 0032137987
PISSN: 08842914
EISSN: None
Source Type: Journal
DOI: 10.1557/JMR.1998.0296 Document Type: Article |
Times cited : (7)
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References (15)
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