Micromechanical photonic integrated circuits

IEICE Transactions on Electronics

Volumn E83-C, Issue 6, 2000, Pages 903-910

  Ming, C W ^a,b   Fan, Li ^a   Guo Dong, S ^a  

^a University of California   (United States)

^b Optical Micro Machines Inc   (United States)

Author keywords

AIOEMS; MEMS; Micro optics; Optical interconnect; Optical mems; Photonic integrated circuits

Indexed keywords

MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROOPTICS; MIRRORS; MONOLITHIC INTEGRATED CIRCUITS; OPTICAL INSTRUMENT LENSES; OPTICAL INTERCONNECTS; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SEMICONDUCTOR LASERS; SUBSTRATES;

PHOTONIC INTEGRATED CIRCUITS (PIC); SCANNING MICROLENSES; TWO-AXIS TILTING MICROMIRRORS; VERTICAL CAVITY SURFACE EMITTING LASERS (VCSEL);

INTEGRATED OPTOELECTRONICS;

EID: 0034196090     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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