MicroJoinery: Micromachined translational stages for optomechanical devices and systems

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 273-274

  Gonzalez, C ^a   Collins, S D ^a  

^a Damien Associates   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; OPTICAL SWITCHES; OPTICAL WAVEGUIDES; WAVEGUIDE COUPLERS;

MICRO OPTO MECHANICAL SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0030650986     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (1)