The nuclear microprobe: A unique instrument

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 130, Issue 1-4, 1997, Pages 1-8

  Watt, Frank ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DIAMONDS; INTEGRATED CIRCUIT MANUFACTURE; ION BEAMS; ION IMPLANTATION; MICROMACHINING; PROBES; RADIATION EFFECTS; X RAY ANALYSIS;

NUCLEAR MICROPROBES; PARTICLE INDUCED X RAY EMISSION;

NUCLEAR INSTRUMENTATION;

EID: 0031549036     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00164-X     Document Type: Article

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