Optical beam steering using surface micromachined gratings and optical phased arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3131, Issue , 1997, Pages 99-110

  Burns, David M ^a   Bright, Victor M ^a   Gustafson, Steven C ^b   Watson, Edward A ^c  

^a AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

^b UNIVERSITY OF DAYTON   (United States)

^c AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

Arrays; Gratings; Microelectromechanical systems; Mirrors; Optics

Indexed keywords

DIFFRACTION; ELECTROMECHANICAL DEVICES; ELECTROSTATIC ACTUATORS; ELECTROSTATIC DEVICES; ELECTROSTATICS; IMAGING SYSTEMS; LIGHT; LIGHT MODULATION; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMECHANICS; MIRRORS; OPTICAL COMMUNICATION; OPTICAL DEVICES; POLYSILICON; RADAR; SCANNING; STEERING;

ARRAYS; BEAM DIAMETERS; BEAM STEERING; DRIVE POWER; ELECTROSTATIC ACTUATIONS; FAR FIELDS; GRATINGS; HIGH SPEEDS; MECHANICAL SYSTEM (MS); MICRO-MIRRORS; MICROELECTROMECHANICAL SYSTEMS; OPTICAL BEAM STEERING; OPTICS; SYSTEM RESPONSES;

COMPOSITE MICROMECHANICS;

EID: 57649162183     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.277738     Document Type: Conference Paper

References (12)

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