Vertical scanning long trace profiler: A tool for metrology of x-ray mirrors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3152, Issue , 1997, Pages 180-187

  Li, Haizhang ^a   Takacs, Peter Z ^b   Oversluizen, Tom ^c  

^a Continental Optical Corporation ^*  (United States)

^b BROOKHAVEN NATIONAL LABORATORY   (United States)

^c Creative Instrumentation   (United States)

Author keywords

Interferometry; Laser scanning device; Metrology; Synchrotron radiation optics; X ray optics

Indexed keywords

CONCURRENCY CONTROL; CONTROL SYSTEMS; DEFORMATION; ELECTROMAGNETIC WAVES; FOURIER TRANSFORMS; INTERFEROMETERS; INTERFEROMETRY; LASER APPLICATIONS; LASERS; LENSES; MACHINE DESIGN; MIRRORS; MOTION CONTROL; NASA; OPTICAL INSTRUMENTS; OPTICAL SYSTEMS; PRISMS; PROFILOMETRY; SOFTWARE PROTOTYPING; SYNCHROTRON RADIATION; SYNCHROTRONS;

AXIS MOTION CONTROL; BEAM SPLITTING; CYLINDER LENS; FOURIER TRANSFORM LENS; LASER PATTERNING; LASER SCANNING DEVICE; LONG TRACE PROFILERS; MEASUREMENT ACCURACY; MECHANICAL STRUCTURES; MECHANICAL SYSTEM (MS); METROLOGY; PHASE I; PHASE II; PROTOTYPE INSTRUMENTS; RISLEY PRISM; SYNCHROTRON RADIATION OPTICS; TEMPERATURE CHANGING; TRAVEL DISTANCES; VERTICAL SCANNING; X-RAY OPTICS;

SCANNING;

EID: 0010755068     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.295557     Document Type: Conference Paper

References (8)

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8. T. Oversluizen, W. Stoeber, and E. D. Johnson, "Kinematic mounting systems for National Synchrotron Light Source beamlines and experiments" Review of Scientific Instruments, 63 (1), pp. 1285-1288, (1992)