Measurement of x-ray telescope mirrors using a vertical scanning long trace profiler

Optical Engineering

Volumn 35, Issue 2, 1996, Pages 330-338

  Li, Haizhang ^a,b,d,e,f,g   Li, Xiaodan ^b,h,i   Grindel, Manfred W ^a,b,f,j,k   Takacs, Peter Z ^a,c,l,m  

^a SPIE ^*

^b Continental Optical Corporation ^*  (United States)

^c BROOKHAVEN NATIONAL LABORATORY   (United States)

^d UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING   (China)

^e UNIVERSITY OF MINNESOTA   (United States)

^f Continental Optical Corp ^*

^g NASA HEADQUARTERS   (United States)

^h UNIVERSITY OF NEW BRUNSWICK   (Canada)

ⁱ Knogo North America

^j Boxton Beel

^k OPTICAL SOCIETY OF AMERICA   (United States)

^l RUTGERS UNIVERSITY   (United States)

^m JOHNS HOPKINS UNIVERSITY   (United States)

more..

Author keywords

Optical interferometry; Optical metrology; Profilometry; Surface figure; X ray optics

Indexed keywords

EID: 0010715288     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.600900     Document Type: Article

References (11)

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3. P. Z. Takacs, K. Furenlid, R. DeBiasse, and E. L. Church, "Surface topography measurements over the 1 meter to 10 micrometer spatial period bandwidth," Proc. SPIE 1164, 203-211 (1989).
4. P. Z. Takacs and S.-N. Qian, "Surface profiling interferometer," U.S. Patent No. 4884697 (Dec. 5, 1989).
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8. S.-N. Qian, W. Jark, and P. Z. Takacs, "The penta-prism LTP: a longtrace-profiler with stationary optical head and moving penta-prism," Rev. Sci. Instrum. 66 (3), 2562-2569 (1995)
9. W. J. Smith, Modern Optical Engineering, 2nd ed., McGraw-Hill, New York (1990).
10. R. B. Hooker, "Automatic Wavefront error sensor," Appl. Opt. 12, 865-871 (1973).
11. A. Sarnik and G. Neidhart-Zimmerman, "Integrated end-to-end metrology and data analysis system for the Advanced X-ray Astrophysics Facility telescope mirrors," Proc. SPIE 1531, 2-19 (1991).