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Volumn 71, Issue 1-3, 2000, Pages 315-320
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Nitrogen induced states at the CNx/Si interface
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Author keywords
[No Author keywords available]
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Indexed keywords
ALUMINUM;
CARBON INORGANIC COMPOUNDS;
ELECTRIC CONTACTS;
ELECTRON ENERGY LEVELS;
FILM GROWTH;
INTERFACES (MATERIALS);
MAGNETRON SPUTTERING;
MIS DEVICES;
NITRIDES;
NITROGEN;
SILICON WAFERS;
SPUTTER DEPOSITION;
ADMITTANCE SPECTROSCOPY;
CARBON NITRIDE;
INTERFACE STATES;
ELECTRIC INSULATING MATERIALS;
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EID: 0033881554
PISSN: 09215107
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-5107(99)00398-0 Document Type: Article |
Times cited : (3)
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References (13)
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