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Volumn 71, Issue 1-3, 2000, Pages 315-320

Nitrogen induced states at the CNx/Si interface

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; CARBON INORGANIC COMPOUNDS; ELECTRIC CONTACTS; ELECTRON ENERGY LEVELS; FILM GROWTH; INTERFACES (MATERIALS); MAGNETRON SPUTTERING; MIS DEVICES; NITRIDES; NITROGEN; SILICON WAFERS; SPUTTER DEPOSITION;

EID: 0033881554     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(99)00398-0     Document Type: Article
Times cited : (3)

References (13)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.