Compositional gradient in and mechanical stability of RF-sputtered and RTA annealed Pb(Zr,Ti)O3 thin films

Sensors and Actuators, A: Physical

Volumn 74, Issue 1, 1999, Pages 77-80

  Defaÿ, Emmanuel ^a   Semmache, Bachir ^a   Dubois, Christiane ^a   Leberre, Martine ^a   Barbier, Daniel ^a  

^a INSTITUT DES NANOTECHNOLOGIES DE LYON   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CORRELATION THEORY; CRYSTAL ORIENTATION; CRYSTALLIZATION; FERROELECTRICITY; LEAD COMPOUNDS; MAGNETRON SPUTTERING; POLARIZATION; RAPID THERMAL ANNEALING; SECONDARY ION MASS SPECTROMETRY; STABILITY; SUBSTRATES; THIN FILMS;

LEAD GRADIENT; LEAD ZIRCONATE TITANATE; MECHANICAL STABILITY;

DIELECTRIC FILMS;

EID: 0032648985     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00351-3     Document Type: Article

References (9)

1. Moazzami R. Ferroelectric thin film technology for semiconductor memory. Semicond. Sci. Technol. 10:1995;375-390.
2. Muralt P., Kohli M., Maeder T., Kholkin A., Brooks K., Setter N., Luthier R. Fabrication and characterisation of PZT thin film vibrators for micromotors. Sensors and Actuators A. 48:1995;157-165.
3. M. Koch, N. Harris, A.G.R. Evans, N.M. White, A. Brunnschweiler, A novel micromachined pump based on thick-film piezoelectric actuation, Proc. of the Int. Conf. on Solid-State Sensors and Actuators, Transducers 97, Chicago, MI, USA, June 16-19, 1997, pp. 353-356.
4. Sreenivas K., Sayer M., Garett P. Properties of DC magnetron sputtered lead zirconate titanate thin films. Thin Solid Films. 172:1989;251-267.
5. 3 thin films by means of the orthogonal array method, to be published in Mater. Sci. Eng. B, accepted in March 1998.
6. Ikeda S., Kobayashi S., Wada Y. Analysis of the effect of electrical conductance of ferroelectric polymers on D-E hysteresis curves measured by the Tower-Sawyer method. J. Polym. Sci. 23:1985;1513-1521.
7. B. Tonaboylu, P.C. Harvey, F. Deng, C. Fan, S. Esener, Ferroelectric PLZT thin films deposited by RF triode magnetron sputtering for spatial light modulators, IEEE 10th Int. Symp. on Applications of Ferroelectrics (ISAF), East Brunswick, NJ, USA, August 18-21, 1996, pp. 675-678.
8. Sreenivas K., Reaney I., Maeder T., Setter N. Investigation of Pt/Ti bilayer metallization on silicon for ferroelectric thin film integration. J. Appl. Phys. 75(1):1994;232-239.
9. Powder Diffraction File Alphabetic Index: Inorganic Phases (JCPDS), File No. 33-784, Swathmore, PA, 1986.