Optimisation of RF magnetron sputtering and RTA-crystallisation of Pb(Zr0.52Ti0.48)O3 thin films by means of the orthogonal array method

Materials Science and Engineering B

Volumn B55, Issue 1-2, 1998, Pages 123-129

  Defay, Emmanuel ^a   Leberre, Martine ^a   Semmache, Bachir ^a   Troccaz, Michel ^b   Barbier, Daniel ^a  

^a UNIVERSITÉ DE LYON   (France)

^b University de Lyon   (France)

Author keywords

Orthogonal array method; PZT thin films; Rapid thermal annealing; RF magnetron sputtering

Indexed keywords

ANNEALING; CRYSTALLIZATION; FERROELECTRIC MATERIALS; LEAD COMPOUNDS; MAGNETRON SPUTTERING; PIEZOELECTRIC MATERIALS; TITANIUM DIOXIDE; ZIRCONIA;

MIXED OXIDES; RAPID THERMAL ANNEALING;

THIN FILMS;

EID: 0344788835     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0921-5107(98)00172-x     Document Type: Article

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