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Volumn 68, Issue 14, 1996, Pages 1930-1932

Structures and dielectric properties of thin polyimide films with nano-foam morphology

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0001091506     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.115629     Document Type: Article
Times cited : (53)

References (9)
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    • 22244453191 scopus 로고    scopus 로고
    • R. R. Tummala and E. J. Rymaszewski, Microelectronics Packaging Handbook (Van Nostrand-Reinhold, New York, 1989), Chap. 1.
    • R. R. Tummala and E. J. Rymaszewski, Microelectronics Packaging Handbook (Van Nostrand-Reinhold, New York, 1989), Chap. 1.
  • 2
    • 22244455859 scopus 로고    scopus 로고
    • G. Czornyj, K. R. Chen, G. Prada-Silva, A. Arnold, H. Souleotis, S. Kim, M. Ree, W. Volksen, D. Dawson, and R. DiPietro, 42nd Electronic Components and Technology Conference, 682 (1992).
    • G. Czornyj, K. R. Chen, G. Prada-Silva, A. Arnold, H. Souleotis, S. Kim, M. Ree, W. Volksen, D. Dawson, and R. DiPietro, 42nd Electronic Components and Technology Conference, 682 (1992).
  • 3
    • 0027848479 scopus 로고    scopus 로고
    • J. Paraszczak, D. Edelstein, S. Cohen, E. Babich, and J. Hummel, ''High Performance Dielectric and Processes for ULSI Interconnection Technologies,'' International Electron Devices Meeting, Washington DC, pp. 261-264 (1993) (unpublished).
    • J. Paraszczak, D. Edelstein, S. Cohen, E. Babich, and J. Hummel, ''High Performance Dielectric and Processes for ULSI Interconnection Technologies,'' International Electron Devices Meeting, Washington DC, pp. 261-264 (1993) (unpublished).
  • 5
    • 22244432954 scopus 로고    scopus 로고
    • S. Jayaraman, S. Srinivas, G. L. Wilkes, J. E. McGrath, J. L. Hedrick, W. Volksen, and J. W. Labadie, Polym. Prep. 35, 347 (1994).
    • S. Jayaraman, S. Srinivas, G. L. Wilkes, J. E. McGrath, J. L. Hedrick, W. Volksen, and J. W. Labadie, Polym. Prep. 35, 347 (1994).
  • 6
    • 0029194194 scopus 로고    scopus 로고
    • K. R. Carter, H. J. Cha, R. A. DiPietro, C. J. Hawker, J. L. Hedrick, J. W. Labadie, J. E. McGrath, T. P. Russell, M. I. Sanchez, S. A. Swanson, W. Volksen, and D. Y. Yoon, Mater. Res. Soc. Symp. Proc. 381, 79 (1995).
    • K. R. Carter, H. J. Cha, R. A. DiPietro, C. J. Hawker, J. L. Hedrick, J. W. Labadie, J. E. McGrath, T. P. Russell, M. I. Sanchez, S. A. Swanson, W. Volksen, and D. Y. Yoon, Mater. Res. Soc. Symp. Proc. 381, 79 (1995).
  • 8
    • 22244464982 scopus 로고    scopus 로고
    • J. C. Maxwell-Garnett, Phil. Trans. R. Soc. 205, 237 (1905).
    • J. C. Maxwell-Garnett, Phil. Trans. R. Soc. 205, 237 (1905).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.