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Journal of Non-Crystalline Solids

Volumn 187, Issue , 1995, Pages 1-9

Dielectrics in microelectronics — problems and perspectives

a DELFT UNIVERSITY OF TECHNOLOGY (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84990988803 PISSN: 00223093 EISSN: None Source Type: Journal
DOI: 10.1016/0022-3093(95)00103-4 Document Type: Article

Times cited : (26)

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