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Volumn 120, Issue 1-4, 1996, Pages 147-150
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Monte Carlo simulation of ion implantation in crystalline SiC
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Author keywords
[No Author keywords available]
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Indexed keywords
CRYSTAL LATTICES;
ION BEAMS;
ION BOMBARDMENT;
ION IMPLANTATION;
MONTE CARLO METHODS;
SIMULATION;
SILICON CARBIDE;
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EID: 0030566507
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0168-583X(96)00497-1 Document Type: Article |
Times cited : (20)
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References (22)
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