Stabilized field emission behavior of diamond-like carbon-coated Si tips

Surface and Coatings Technology

Volumn 120-121, Issue , 1999, Pages 734-739

  Ahn, Sang Hyuk ^a,b   Lee, Kwang Ryeol ^a   Eun, Kwang Yong ^a   Jeon, Dongryul ^b  

^a Korea Institute of Science and Technology   (South Korea)

^b Myong Ji University   (South Korea)

Author keywords

Diamond like carbon; Field emission; Si tip; Sputtering

Indexed keywords

COATING; DIAMOND-LIKE CARBON; SPUTTERING;

EID: 0033504665     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00367-9     Document Type: Conference Paper

References (16)

1. Bintz W.J., McGruer N.E. J. Vac. Sci. Technol. B: 12:1994;697.
2. Temple D., Palmer D., Mancusi J., Yadon L., Vellenga D., McGuire G.E. IVMC 98 Tech. Dig. 11th Int. Vac. Microelectronics Conf., Asheville, USA. 1998;99.
3. Li Q., Xu J.F., Song H.B., Liu X.F., Kang W.P. J. Vac. Sci. Technol. B: 14:1996;1889.
4. Liu J., Zhirnov V.V., Myers A.F., Wojak G.J., Choi W.B., Hren J.J., Wolter S.D., McClure M.T., Stoner B.R., Glass J.T. J. Vac. Sci. Technol. B: 13:1995;442.
5. Kang W.P., Davidson J.L., Howell M., Bhuva B., Kinser D.L., Kerns D.V., Li Q., Xu J.F. J. Vac. Sci. Technol. B: 14:1996;2068.
6. Zhirnov V.V., Voronin A.B., Givargizov E.I., Meshcheryakova A.L. J. Vac. Sci. Technol. B: 14:1996;2034.
7. Jung M.-Y., Kim D.W., Choi S.S., Kim Y., Kuk Y., Park K.C., Jang J. Thin Solid Films. 294:1997;157.
8. Lee S., Lee S., Lee S., Jeon D., Lee K.-R. J. Vac. Sci. Technol. B: 15:1997;457.
9. Lee S., Ju B.-K., Lee Y.-H., Jeon D., Oh M.-H. J. Vac. Sci. Technol. B: 15:1997;425.
10. Ko C.-G., Ju B.-K., Lee Y.-H., Park J.-H., Oh M.-H. Jpn. J. Appl. Phys. 35:1996;L1305.
11. Myers A.F., Camphausen S.M., Cuomo J.J., Hren J.J., Liu J., Bruley J. J. Vac. Sci. Technol. B: 14:1996;2024.
12. Ding M.Q., Myers A.F., Choi W.B., Vispute R.D., Camphausen S.M., Narayan J., Cuomo J.J., Hren J.J., Bruley J. J. Vac. Sci. Technol. B: 15:1997;840.
13. D.O. Smith, J.S. Judge, M. Trongello, P.R. Thronton, US Patent 3 970 887, 1976.
14. K.-R. Lee, et al., Development of high performance components using mechanical properties of diamond-like carbon films, MOST report BSN1718-6190-4, 1998, p. 23.
15. S.-H. Ahn, M.S. Thesis, Myongji University, 1999.
16. Song Y.-H., Lee J.-H., Kang S.-Y., Lee Y.-I., Cho K.-I., Yoo H.-J. J. Vac. Sci. Technol. B: 16:1998;815.