Analysis of electron emission degradation in silicon field emitter arrays

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 2, 1998, Pages 815-817

  Song, Yoon Ho ^a   Lee, Jin Ho ^a   Kang, Seung Youl ^a   Lee, Yong Il ^a   Cho, Kyoung Ik ^a   Yoo, Hyung Joun ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005533549     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589912     Document Type: Article

References (10)

1. K. Betsui, Tech. Dig. 4th International Vacuum Macroelectronics Conference, Nagahama, Japan, August, 1991, p. 26.
2. H. H. Busta, J. E. Pogemiller, and B. J. Zimmerman, IEEE Trans. Electron Devices 40, 1530 (1993).
3. D. Kim, S. J. Kwon, and J. D. Lee, Tech. Dig. 9th International Vacuum Microelectronics Conference, St. Petersburg, Russia, July, 1996, p. 534.
4. Y.-H. Song, J. H. Lee, S. W. Kang, B.-G. Yu, J. Kim, K. I. Cho, and H. J. Yoo, 1997 Society for Information Display Int. Symp. Dig. Tech. Papers, Boston, 13-15 May 1997, p. 599.
5. J. Browning, N. E. McGruer, S. Meassick, C. Chan, W. J. Bintz, and M. Gilmore, IEEE Trans. Plasma Sci. 20, 499 (1992).
6. W. J. Bintz and N. E. McGruer, J. Vac. Sci. Technol. B 12, 697 (1994).
7. J. H. Lee, Y.-H. Song, S. W. Kang, B. G. Yu, K. I. Cho, S. Y. Lee, and H. J. Yoo, Proc. 4th Asian Sym. Information Display, Hong Kong, 1997, p. 147.
8. M. G. Ancona, Tech. Dig. 8th International Vacuum Microelectronics Conference, Portland, Oregon, July, 1995, p. 61.
9. P. R. Schwoebel and I. Brodie, J. Vac. Sci. Technol. B 13, 1391 (1995).
10. I. Brodie and P. R. Schwoebel, Proc. IEEE 82, 1006 (1994).