Self-aligned silicon tips coated with diamondlike carbon

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 2, 1997, Pages 457-459

  Lee, Sanjo ^a   Lee, Sunnup ^a   Lee, Sungwoon ^a   Jeon, D ^a   Lee, Kwang Ryeol ^b  

^a Myong Ji University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 9144246347     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589598     Document Type: Article

References (5)

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3. R. B. Marcus, K. Chin, D. Liu, W. J. Orvis, D. R. Diavlo, C. E. Hunt, and J. Trujillo, Appl. Phys. Lett. 56, 236 (1990).
4. T. Asano, Y. Oobuchi, and S. Katsumata, J. Vac. Sci. Technol. B 13, 431 (1995).
5. Z.-H. Huang, M. S. Chung, P. H. Cutler, N. M. Miskovsky, and T. E. Sullivan, Appl. Phys. Lett. 67, 1235 (1995).