Fabrication of a nanosize Si-tip coated with a thin diamond-like carbon film

Thin Solid Films

Volumn 294, Issue 1-2, 1997, Pages 157-159

  Jung, Mi Young ^a   Kim, D W ^a   Choi, S S ^a   Kim, Yong Suk ^a   Kuk, Y ^b   Park, K C ^c   Jang, J ^c  

^a SunMoon University   (South Korea)

^b Seoul National University   (South Korea)

^c Kyung Hee University   (South Korea)

Author keywords

Diamond like carbon; Field emission; Nano size Si tip; Workfunction

Indexed keywords

CARBON; ETCHING; NANOSTRUCTURED MATERIALS; OXIDATION;

DIAMOND-LIKE CARBON; FIELD EMISSION;

SILICON WAFERS;

EID: 0031073114     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09301-7     Document Type: Article

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