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Sensors and Materials

Volumn 11, Issue 5, 1999, Pages 297-304

Polymer hot embossing with silicon master structures

(2) Becker, Holger a Heim, Ulf a

a Jenoptik Mikrotechnik (Germany)

Author keywords

Hot embossing; Microfluidics; Polymer microfabrication

Indexed keywords

EID: 0033473707 PISSN: 09144935 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (30)

References (20)

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